{"id":"W1992708321","doi":"10.1109/ted.2013.2297677","title":"Design and Fabrication of a Novel MEMS Capacitive Transducer With Multiple Moving Membrane, ${\\rm M}^{3}$-CMUT","year":2014,"lang":"en","type":"article","venue":"IEEE Transactions on Electron Devices","topic":"Ultrasonics and Acoustic Wave Propagation","field":"Engineering","cited_by":21,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Manitoba","funders":"CMC Microsystems","keywords":"Transducer; Capacitive micromachined ultrasonic transducers; Capacitive sensing; Materials science; Microelectromechanical systems; Fabrication; Acoustics; Ultrasonic sensor; Deflection (physics); Voltage; Surface micromachining; Optoelectronics; Electrical engineering; Engineering; Optics","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0003218395,0.0004971933,0.0004753783,0.0003025136,0.0003083436,0.0005291495,0.00138734,0.001229165,0.0006570052],"category_scores_gemma":[0.0003948006,0.0004976077,0.0002958601,0.0004229066,0.0003300596,0.0008486207,0.0004901547,0.0004405798,0.0004596274],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0005507428,"about_ca_system_score_gemma":0.0008715325,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0006667376,"about_ca_topic_score_gemma":0.001498958,"domain_scores_codex":[0.9995794,0.00001680839,0.00002565284,0.00012813,0.0002161188,0.00003395064],"domain_scores_gemma":[0.9997347,0.00004110805,0.00008026155,0.00002178918,0.00008451976,0.00003771079],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00001156147,0.000008080553,0.0001098395,0.0000697185,0.000004246606,0.00006294459,0.00002009249,0.0002084833,0.9937732,0.0003982525,0.0001307248,0.005202925],"study_design_scores_gemma":[0.00002626764,0.0003712558,0.001309619,0.00001035225,0.00003136775,0.0007767797,0.00004230511,0.01156393,0.9749605,0.000134303,0.01073691,0.00003638081],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"methods","genre_gemma":"empirical","genre_scores_codex":[0.3895585,0.00393129,0.5961197,0.001014191,0.0008082823,0.0006642294,0.0005994029,0.001446249,0.00585823],"genre_scores_gemma":[0.4100519,0.001240748,0.5835484,0.0003106781,0.0001319186,0.0003486135,0.000218053,0.0000482361,0.004101446],"genre_candidate":"empirical","genre_consensus":null,"teacher_disagreement_score":0.00138734,"threshold_uncertainty_score":0.003995955,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.00961646367147393,"score_gpt":0.196848786954693,"score_spread":0.1872323232832191,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}