{"id":"W1992716204","doi":"10.1007/s00542-013-1940-7","title":"Large tuning ratio high aspect ratio variable capacitors using leveraged bending","year":2013,"lang":"en","type":"article","venue":"Microsystem Technologies","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":4,"is_retracted":false,"has_abstract":false,"ca_institutions":"Canadian Light Source (Canada); University of Saskatchewan","funders":"","keywords":"Variable capacitor; Capacitor; Capacitance; Materials science; Electrode; Fabrication; Optoelectronics; Electrical engineering; Voltage; Engineering; Physics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0002834263,0.0004833844,0.0002696005,0.0002762213,0.0003277311,0.0007429941,0.001139989,0.0005009249,0.002459045],"category_scores_gemma":[0.0003769091,0.0003320011,0.0001632773,0.0003563885,0.0003113998,0.001006464,0.000575255,0.0005102871,0.0007175215],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0004751463,"about_ca_system_score_gemma":0.0003124591,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0004445365,"about_ca_topic_score_gemma":0.002004661,"domain_scores_codex":[0.9997798,0.00001325931,0.000008435137,0.00006427989,0.0001041584,0.00003010202],"domain_scores_gemma":[0.9997461,0.00005088711,0.00005236463,0.00006040194,0.00005244169,0.00003781097],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00006608402,0.00003232333,0.0002225636,0.00004428263,0.00001433063,0.00009427197,0.00003295809,0.000750094,0.9861395,0.002141638,0.0008180632,0.009643903],"study_design_scores_gemma":[0.00008640841,0.0002774621,0.00189489,0.00001041272,0.00002877256,0.0005459169,0.00004932807,0.01574346,0.968456,0.0008539981,0.01200627,0.00004710959],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.8639151,0.001834222,0.09924664,0.0009792282,0.0005585948,0.0001203401,0.0003268444,0.002892895,0.03012605],"genre_scores_gemma":[0.9631761,0.0002049712,0.0310882,0.0001547283,0.00006974379,0.00002371452,0.0001065717,0.0001313251,0.005044706],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.002459045,"threshold_uncertainty_score":0.008226335,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01156728891694547,"score_gpt":0.2048277095659472,"score_spread":0.1932604206490017,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}