{"id":"W1994111822","doi":"10.1002/cvde.200306284","title":"Synthesis and Characterization of Tris(β‐ketoiminato)ruthenium(<scp>III</scp>) Complexes: Potential Precursors for CVD of Ru and RuO<sub>2</sub> Thin Films","year":2004,"lang":"en","type":"article","venue":"Chemical Vapor Deposition","topic":"Semiconductor materials and devices","field":"Engineering","cited_by":16,"is_retracted":false,"has_abstract":true,"ca_institutions":"National Research Council Canada; Steacie Institute for Molecular Sciences","funders":"","keywords":"X-ray photoelectron spectroscopy; Ruthenium; Crystallography; Chemistry; Metal; Thermal stability; Scanning electron microscope; Steric effects; Thin film; Single crystal; Octahedron; Crystal structure; Materials science; Stereochemistry; Nanotechnology; Catalysis; Chemical engineering; Organic chemistry","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001140381,0.0002441271,0.0002089142,0.0001520745,0.0001145499,0.0003289541,0.0002518643,0.0002511456,0.0007772708],"category_scores_gemma":[0.0002328915,0.0001718158,0.00008388078,0.0001263607,0.000113024,0.0001374981,0.000117891,0.000200512,0.0002069678],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001865649,"about_ca_system_score_gemma":0.0001023153,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0004834593,"about_ca_topic_score_gemma":0.0007550336,"domain_scores_codex":[0.9999152,0.000008944227,0.000006513025,0.00002136671,0.00003365841,0.00001424032],"domain_scores_gemma":[0.9998894,0.00002072349,0.00003161718,0.00001023493,0.00002873015,0.00001932158],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00001976919,0.000003654073,0.00006784091,0.00002478888,0.000002282149,0.0000292591,0.000008961651,0.00004316686,0.9992704,0.00001774248,0.00002188638,0.000490342],"study_design_scores_gemma":[0.00000451866,0.00003731189,0.0006818456,0.000001740159,0.000005081358,0.00006631605,0.000007742,0.0003162244,0.9982677,0.000005026337,0.0006044511,0.000002070728],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9917971,0.0008777039,0.005006771,0.00003882577,0.00001880748,0.00005311816,0.0003401199,0.0001305987,0.001736991],"genre_scores_gemma":[0.9926366,0.0003996731,0.005476022,0.0000166588,0.000005159411,0.00003563312,0.0002205476,0.00005126229,0.001158356],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.0007772708,"threshold_uncertainty_score":0.002600253,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.007399485730219861,"score_gpt":0.1896990720803215,"score_spread":0.1822995863501016,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}