{"id":"W1994111822","doi":"10.1002/cvde.200306284","title":"Synthesis and Characterization of Tris(β‐ketoiminato)ruthenium(<scp>III</scp>) Complexes: Potential Precursors for CVD of Ru and RuO<sub>2</sub> Thin Films","year":2004,"lang":"en","type":"article","venue":"Chemical Vapor Deposition","topic":"Semiconductor materials and devices","field":"Engineering","cited_by":16,"is_retracted":false,"has_abstract":true,"ca_institutions":"National Research Council Canada; Steacie Institute for Molecular Sciences","funders":"","keywords":"X-ray photoelectron spectroscopy; Ruthenium; Crystallography; Chemistry; Metal; Thermal stability; Scanning electron microscope; Steric effects; Thin film; Single crystal; Octahedron; Crystal structure; Materials science; Stereochemistry; Nanotechnology; Catalysis; Chemical engineering; Organic chemistry","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00008344637,0.0001692049,0.0003288428,0.00006879227,0.00003402685,0.0000315133,0.00006684894,0.0001679145,0.000002770483],"category_scores_gemma":[0.00005220529,0.0001697901,0.00006158043,0.00007594856,0.00007589265,0.0001839399,0.00002404745,0.00005683184,6.627276e-7],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00002205687,"about_ca_system_score_gemma":0.000008825948,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00001265524,"about_ca_topic_score_gemma":6.446072e-7,"domain_scores_codex":[0.9991267,0.00001358267,0.0003776121,0.0001970012,0.0001196792,0.0001654748],"domain_scores_gemma":[0.9995074,0.0001126232,0.000142572,0.0001094798,0.00006057185,0.00006732434],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00003510564,0.00004188771,0.00002130029,0.0006433142,0.00003832475,7.974193e-7,0.0003678402,0.00005557313,0.9982122,0.00007697754,0.00001216094,0.0004945874],"study_design_scores_gemma":[0.0006474595,0.00004736524,0.001356152,0.0002020619,0.0001069046,0.00002100894,0.00009989598,0.001664161,0.9953709,0.0003876061,0.000003499674,0.00009294452],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9971749,0.0002398864,0.001852467,0.000009287347,0.0001421322,0.0002957983,0.0001852254,0.00007368171,0.00002663044],"genre_scores_gemma":[0.9985732,0.0001587556,0.000902079,0.00001114191,0.00006531366,0.00004580215,0.000210965,0.00003176034,9.143558e-7],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.00284119,"threshold_uncertainty_score":0.6923838,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.007399485730219861,"score_gpt":0.1896990720803215,"score_spread":0.1822995863501016,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}