{"id":"W1994359640","doi":"10.1143/jjap.40.4763","title":"SiO<sub>2</sub> Surface and SiO<sub>2</sub>/Si Interface Topography Change by Thermal Oxidation","year":2001,"lang":"en","type":"article","venue":"Japanese Journal of Applied Physics","topic":"Semiconductor materials and devices","field":"Engineering","cited_by":21,"is_retracted":false,"has_abstract":true,"ca_institutions":"Hatch (Canada)","funders":"","keywords":"Terrace (agriculture); Thermal oxidation; Oxide; Materials science; Atmospheric temperature range; Silicon; Thermal; Surface (topology); Mineralogy; Chemistry; Optoelectronics; Metallurgy; Geometry; Thermodynamics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00007885254,0.00021458,0.0001435702,0.00009812634,0.0001105497,0.0001376534,0.00009439418,0.0001631929,0.0008239336],"category_scores_gemma":[0.000190851,0.0002025257,0.0001628829,0.00009347677,0.0002444355,0.0001176827,0.0001146671,0.0002165288,0.00008758047],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00008643039,"about_ca_system_score_gemma":0.00008263306,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0005806424,"about_ca_topic_score_gemma":0.0009459755,"domain_scores_codex":[0.9999532,0.000004383296,0.000002132391,0.000007616325,0.00001897607,0.00001369961],"domain_scores_gemma":[0.9999359,0.00001791714,0.00001465545,0.000007509902,0.00001482327,0.000009317061],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00004537253,0.000004035768,0.0004238599,0.00001486547,0.000004627901,0.00002936228,0.00001400297,0.0001396466,0.9988058,0.00002071035,0.00001312382,0.000484541],"study_design_scores_gemma":[0.000009126251,0.0002085977,0.01770643,0.000002614695,0.0000175417,0.0001307203,0.00004954029,0.001361475,0.9800349,0.00003786317,0.0004348461,0.000006366831],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.999047,0.00009824368,0.0003908465,0.000008197188,0.000003287286,0.000003887903,0.00002618716,0.000008750586,0.0004135109],"genre_scores_gemma":[0.9983973,0.0001694878,0.0008668386,0.000009643589,0.000002837387,0.000005521952,0.00005486491,0.000006290398,0.0004872339],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.0008239336,"threshold_uncertainty_score":0.002756357,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01282169741576866,"score_gpt":0.2107177203606869,"score_spread":0.1978960229449182,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}