{"id":"W1994385888","doi":"10.1364/oe.21.011048","title":"Permanent fine tuning of silicon microring devices by femtosecond laser surface amorphization and ablation","year":2013,"lang":"en","type":"article","venue":"Optics Express","topic":"Photonic and Optical Devices","field":"Engineering","cited_by":44,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Alberta","funders":"Natural Sciences and Engineering Research Council of Canada","keywords":"Materials science; Femtosecond; Optics; Laser; Silicon; Resonator; Optoelectronics; Laser ablation; Resonance (particle physics); Wavelength; Waveguide; Etching (microfabrication); Ablation; Nanotechnology","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001535271,0.0002601304,0.0002359101,0.0001462337,0.0001443354,0.0002299172,0.0003004015,0.0002184407,0.000594368],"category_scores_gemma":[0.0003292252,0.0001629828,0.0001827083,0.0000887252,0.0003627337,0.0002939106,0.0002812723,0.0003560272,0.0001309848],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001885609,"about_ca_system_score_gemma":0.0001328576,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0002602805,"about_ca_topic_score_gemma":0.0005987022,"domain_scores_codex":[0.999821,0.00001312834,0.00001134428,0.00004034286,0.00008373213,0.00003044847],"domain_scores_gemma":[0.9997424,0.00007706058,0.00009566556,0.00004569433,0.00002632465,0.00001277339],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0000140569,0.000004550281,0.0001021787,0.00001970022,0.000002632368,0.00001662555,0.00001916299,0.0002781428,0.997225,0.00009667656,0.00002123461,0.0022001],"study_design_scores_gemma":[0.000003169919,0.00006827917,0.0004612465,9.294204e-7,0.000003030368,0.00006167661,0.000009657962,0.002521063,0.9962721,0.00004155238,0.0005538865,0.000003243182],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9817168,0.0007313387,0.01620805,0.00008013538,0.00003500151,0.00001472605,0.00003740107,0.0002517918,0.0009247735],"genre_scores_gemma":[0.992497,0.0001844876,0.006631216,0.00001889598,0.000009446228,0.000009473519,0.00002353096,0.00002870221,0.0005973056],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.000594368,"threshold_uncertainty_score":0.001988411,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.007530869601578768,"score_gpt":0.1988894769310264,"score_spread":0.1913586073294477,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}