{"id":"W1994575712","doi":"10.1088/0022-3727/39/7/012","title":"3D numerical simulation of gas heating effects in a magnetron sputter deposition system","year":2006,"lang":"en","type":"article","venue":"Journal of Physics D Applied Physics","topic":"Metal and Thin Film Mechanics","field":"Engineering","cited_by":25,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Alberta","funders":"","keywords":"Sputter deposition; Deposition (geology); Cavity magnetron; Materials science; Nuclear engineering; Sputtering; Engineering physics; Metallurgy; Engineering; Nanotechnology; Thin film; Geology","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.000134881,0.0001630542,0.0003895948,0.00004676886,0.00002357992,0.00001849687,0.00009234616,0.00006125504,0.000001362565],"category_scores_gemma":[0.000002597779,0.0001563475,0.0001153423,0.0002868028,0.000009766374,0.0001507741,0.00001673962,0.0002700012,0.000006041732],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001153305,"about_ca_system_score_gemma":0.00001261486,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00001126959,"about_ca_topic_score_gemma":3.749739e-7,"domain_scores_codex":[0.9988846,0.00002820863,0.0005096958,0.00008972206,0.0003115975,0.0001762014],"domain_scores_gemma":[0.9994575,0.00007362772,0.0002649873,0.0001050351,0.00006184611,0.00003702582],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"simulation_or_modeling","study_design_gemma":"simulation_or_modeling","study_design_scores_codex":[0.00002215028,0.00009781391,0.00005808027,0.0004470167,0.00002439657,0.000005834415,0.00008421705,0.8349881,0.1361258,0.01556819,0.00001800347,0.01256038],"study_design_scores_gemma":[0.0006000752,0.0000761735,0.0001794464,0.000189738,0.00005243175,0.000004493738,0.00002051152,0.8290953,0.1568733,0.01276131,0.000008701571,0.0001385058],"study_design_candidate":"simulation_or_modeling","study_design_consensus":"simulation_or_modeling","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.5089629,0.00004793402,0.489428,0.000001427152,0.000301094,0.0001217267,0.000002124431,0.00002672579,0.001108031],"genre_scores_gemma":[0.9937272,0.00000151378,0.00543986,0.000007465927,0.0007763355,0.000004323753,0.000006824897,0.00003329178,0.000003171485],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.4847643,"threshold_uncertainty_score":0.6375667,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.004954999101478734,"score_gpt":0.1882694075124271,"score_spread":0.1833144084109483,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}