{"id":"W1994917736","doi":"10.1109/tmtt.2007.914657","title":"Novel High-$Q$ MEMS Curled-Plate Variable Capacitors Fabricated in 0.35-$\\mu{\\hbox {m}}$ CMOS Technology","year":2008,"lang":"en","type":"article","venue":"IEEE Transactions on Microwave Theory and Techniques","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":50,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Waterloo","funders":"","keywords":"Capacitor; Variable capacitor; Capacitance; CMOS; Microelectromechanical systems; Materials science; Electrical engineering; Q factor; Filter capacitor; Electronic engineering; Optoelectronics; Engineering; Physics; Voltage; Resonator","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001290334,0.0004025967,0.0003365959,0.0003147505,0.0003510856,0.0007176761,0.001822149,0.0008793594,0.002080027],"category_scores_gemma":[0.0004204911,0.0003566791,0.000237103,0.0005576733,0.0002607631,0.0008498406,0.0003242259,0.0005775182,0.0005470015],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0008529103,"about_ca_system_score_gemma":0.0006795194,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.001888438,"about_ca_topic_score_gemma":0.006191878,"domain_scores_codex":[0.9996949,0.00001007504,0.000009295169,0.00006967296,0.0001794431,0.00003653355],"domain_scores_gemma":[0.999676,0.00004435442,0.00006748758,0.00003586081,0.0001253227,0.00005100559],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00006389427,0.00002102044,0.0002208391,0.0001303127,0.00002761025,0.0003535115,0.00006384274,0.0008034266,0.9855387,0.0008971142,0.0009320126,0.01094765],"study_design_scores_gemma":[0.00005504346,0.000304868,0.002962681,0.00001386709,0.00004259152,0.0009114888,0.00004680758,0.008634401,0.9732299,0.0001831109,0.01355112,0.00006411091],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.8267555,0.004714501,0.1427303,0.001199858,0.001143465,0.0002960476,0.001440723,0.002615331,0.01910418],"genre_scores_gemma":[0.8799929,0.001035602,0.1080957,0.0003155618,0.0001005296,0.00008671101,0.0003549577,0.00009810233,0.009919982],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.002080027,"threshold_uncertainty_score":0.006958365,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.009080038556227828,"score_gpt":0.2082025194588272,"score_spread":0.1991224809025994,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}