{"id":"W1994917736","doi":"10.1109/tmtt.2007.914657","title":"Novel High-$Q$ MEMS Curled-Plate Variable Capacitors Fabricated in 0.35-$\\mu{\\hbox {m}}$ CMOS Technology","year":2008,"lang":"en","type":"article","venue":"IEEE Transactions on Microwave Theory and Techniques","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":50,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Waterloo","funders":"","keywords":"Capacitor; Variable capacitor; Capacitance; CMOS; Microelectromechanical systems; Materials science; Electrical engineering; Q factor; Filter capacitor; Electronic engineering; Optoelectronics; Engineering; Physics; Voltage; Resonator","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":["metaepi_narrow"],"consensus_categories":[],"category_scores_codex":[0.0002191988,0.0003427578,0.0003765819,0.0007469886,0.000207769,0.00001415616,0.0002294186,0.0004956566,0.00003135023],"category_scores_gemma":[0.00001064574,0.0003390029,0.00005728916,0.0007880478,0.000416831,0.0002226284,0.000004932951,0.0008078199,0.000009745546],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001124567,"about_ca_system_score_gemma":0.00001828425,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00004976521,"about_ca_topic_score_gemma":0.00002573557,"domain_scores_codex":[0.9987562,0.000014893,0.0003436537,0.0003645788,0.00009029946,0.0004303751],"domain_scores_gemma":[0.9993423,0.0001236216,0.00004866462,0.0003935183,0.00003630531,0.00005555876],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00004961595,0.0001046069,0.00000352701,0.00002690618,0.00003994086,0.00002477336,0.00009023835,0.0005892441,0.9698716,0.004198708,0.00005489386,0.02494594],"study_design_scores_gemma":[0.0003595923,0.0001585362,0.000006889704,0.00009524718,0.00001964971,0.0002286618,0.0001070754,0.00002375566,0.9721428,0.02513619,0.00135123,0.000370351],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"methods","genre_gemma":"empirical","genre_scores_codex":[0.4519705,0.0002037235,0.5443417,0.00002765175,0.0001552915,0.0002679505,0.00003441077,0.00242946,0.0005692717],"genre_scores_gemma":[0.9704273,0.001963237,0.02706399,0.00003687388,0.00002010746,0.0001908752,0.000003322665,0.00006619519,0.0002281384],"genre_candidate":"empirical","genre_consensus":null,"teacher_disagreement_score":0.5184568,"threshold_uncertainty_score":0.9999062,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.009080038556227828,"score_gpt":0.2082025194588272,"score_spread":0.1991224809025994,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}