{"id":"W1995144250","doi":"10.4028/www.scientific.net/ssp.219.161","title":"Fluid Flow and Defect Density Considerations when Drying Bumped Wafers Using Spin and Surface Tension Gradient Methods","year":2014,"lang":"en","type":"article","venue":"Diffusion and defect data, solid state data. Part B, Solid state phenomena/Solid state phenomena","topic":"Fluid Dynamics and Thin Films","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"Nexen (Canada)","funders":"","keywords":"Surface tension; Materials science; Wafer; Capillary action; Evaporation; Composite material; Particle (ecology); Flow (mathematics); Chemical engineering; Mechanics; Nanotechnology; Thermodynamics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.001168912,0.0003560462,0.0003310078,0.0006059957,0.0004818601,0.0008623078,0.0003930032,0.0005801437,0.001242166],"category_scores_gemma":[0.00213568,0.0003030465,0.0002301433,0.0001995205,0.0005873344,0.001032588,0.0002499224,0.0005088072,0.0002469052],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0003955375,"about_ca_system_score_gemma":0.0003224211,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.001182197,"about_ca_topic_score_gemma":0.002736925,"domain_scores_codex":[0.9995289,0.00007058794,0.0000314123,0.00007961956,0.0002473343,0.00004205964],"domain_scores_gemma":[0.9987519,0.0007814604,0.0001279887,0.00005346376,0.0002516423,0.00003354376],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0001436308,0.00003380849,0.0009629903,0.0002518711,0.000008163924,0.0001187723,0.00009101094,0.0005785604,0.9819735,0.001157554,0.0002103994,0.01446974],"study_design_scores_gemma":[0.00002530508,0.0002062961,0.002379765,0.0000236405,0.00002653611,0.0002957099,0.0000931312,0.00839719,0.9838625,0.0004282544,0.004239569,0.00002217046],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.8196562,0.009713386,0.1616865,0.0009462174,0.0004419569,0.0003080291,0.00028623,0.0006661485,0.00629533],"genre_scores_gemma":[0.8617588,0.003502508,0.1297873,0.0002815124,0.0001669144,0.0001326713,0.0002855161,0.0002706137,0.003814155],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001242166,"threshold_uncertainty_score":0.006181836,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.04189235938960378,"score_gpt":0.3040880167571239,"score_spread":0.2621956573675202,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}