{"id":"W1995315729","doi":"10.1063/1.1615305","title":"Influence of oxygen plasma on electrical and physical parameters of Au–oxide–n-InP structures","year":2003,"lang":"en","type":"article","venue":"Journal of Applied Physics","topic":"Semiconductor materials and devices","field":"Engineering","cited_by":11,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Ottawa","funders":"","keywords":"Oxide; Dielectric; Oxygen; Plasma; Materials science; Capacitance; Thermal conduction; Analytical Chemistry (journal); Chemistry; Optoelectronics; Physical chemistry; Composite material; Electrode; Metallurgy","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00006856102,0.0001191789,0.0003479822,0.0000418356,0.00001259614,0.00001008441,0.00009190725,0.00004413885,0.000001875501],"category_scores_gemma":[0.00001425592,0.00009552907,0.00005682377,0.0001074999,0.00004664957,0.0000683707,0.000007640929,0.0001391103,7.87248e-7],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00002288566,"about_ca_system_score_gemma":0.00002773767,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.000003308146,"about_ca_topic_score_gemma":1.644946e-7,"domain_scores_codex":[0.9993117,0.00001135892,0.0002898607,0.00006791249,0.0001942353,0.0001248717],"domain_scores_gemma":[0.9995021,0.000105497,0.0001985927,0.0000934508,0.00004444076,0.0000558889],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00006004343,0.00003279116,0.0001432044,0.00006492785,0.00007017313,9.411022e-7,0.0003359558,0.193894,0.8003803,0.004557571,0.0000326756,0.0004273384],"study_design_scores_gemma":[0.000377938,0.0001204572,0.003141321,0.00002643435,0.0000383712,0.000006642161,0.00004532809,0.00153846,0.9836473,0.01092708,0.00003117086,0.00009944975],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9994554,0.00003278075,0.00002945142,9.151408e-7,0.00005490553,0.00004727991,0.000004291838,0.000007050925,0.0003679589],"genre_scores_gemma":[0.9990898,0.00001866991,0.0007895948,0.00001476327,0.00007102462,7.894147e-7,3.25411e-7,0.00001463456,3.715213e-7],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.1923556,"threshold_uncertainty_score":0.3895562,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.009090302634155997,"score_gpt":0.2145899993254619,"score_spread":0.2054996966913059,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}