{"id":"W1995382066","doi":"10.1364/oe.16.000965","title":"High power fiber laser driver for efficient EUV lithography source with tin-doped water droplet targets","year":2008,"lang":"en","type":"article","venue":"Optics Express","topic":"Laser-Matter Interactions and Applications","field":"Physics and Astronomy","cited_by":15,"is_retracted":false,"has_abstract":true,"ca_institutions":"Advanced Micro Devices (Canada)","funders":"","keywords":"Extreme ultraviolet lithography; Materials science; Optics; Fiber laser; Laser; Optoelectronics; Lithography; Physics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":["insufficient_payload"],"consensus_categories":[],"category_scores_codex":[0.00003791683,0.0001905411,0.0001715354,0.00005476205,0.0003312597,0.0000653119,0.0001635571,0.00003299327,0.001361629],"category_scores_gemma":[7.458444e-7,0.0001304006,0.0001233542,0.00008215258,0.00008080088,0.00008320515,0.00006073121,0.0001160423,0.0002649605],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.000009697263,"about_ca_system_score_gemma":0.00001354784,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0000557483,"about_ca_topic_score_gemma":6.265796e-7,"domain_scores_codex":[0.9990232,0.00001455011,0.0001890921,0.0003049676,0.0001384543,0.0003297578],"domain_scores_gemma":[0.9992589,0.00004988387,0.00006577261,0.0003806008,0.0001471372,0.00009772712],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"not_applicable","study_design_gemma":"not_applicable","study_design_scores_codex":[0.001172845,0.01525413,0.03493867,0.0002339152,0.003302428,0.0000611418,0.021296,0.3189151,0.1246954,0.0362073,0.4385375,0.005385557],"study_design_scores_gemma":[0.001576427,0.0001255261,0.0005451934,0.0000364974,0.00008991251,0.000007090466,0.0002425576,0.001416525,0.2691633,0.0002509908,0.7259815,0.0005644853],"study_design_candidate":"not_applicable","study_design_consensus":"not_applicable","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.925584,0.000003780624,0.06777219,0.0003158102,0.000105579,0.0004566761,0.0002024618,0.00004800117,0.005511531],"genre_scores_gemma":[0.9748164,6.12515e-7,0.01292146,0.0001042968,0.0001787847,0.0003250909,0.0002033256,0.00004304895,0.01140698],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.3174986,"threshold_uncertainty_score":0.9995512,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.006849497458010947,"score_gpt":0.216515738852928,"score_spread":0.209666241394917,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}