{"id":"W1996143017","doi":"10.1117/12.566966","title":"Sub-spot-size CO 2 laser micromachining of features in fused silica by V-groove etching","year":2004,"lang":"en","type":"article","venue":"Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE","topic":"Laser Material Processing Techniques","field":"Engineering","cited_by":1,"is_retracted":false,"has_abstract":true,"ca_institutions":"Institut National d'Optique","funders":"","keywords":"Surface micromachining; Materials science; Groove (engineering); Etching (microfabrication); Optics; Laser; Laser ablation; Laser beam machining; Substrate (aquarium); Microlens; Optoelectronics; Laser beams; Lens (geology); Nanotechnology; Layer (electronics); Fabrication","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00009030881,0.0001576475,0.0001382226,0.0001400583,0.0001055749,0.0001521675,0.0002769677,0.0001830586,0.0003648427],"category_scores_gemma":[0.000192432,0.0001931393,0.0001419865,0.00009957057,0.0002087376,0.0001554836,0.0001831145,0.0002103172,0.0001958701],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00022235,"about_ca_system_score_gemma":0.0001881998,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0009580294,"about_ca_topic_score_gemma":0.002550522,"domain_scores_codex":[0.9999093,0.000004223088,0.000005677867,0.00002271699,0.00003616212,0.00002192012],"domain_scores_gemma":[0.999894,0.00002745282,0.00002344723,0.00002231925,0.00002170436,0.00001105755],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0000105438,0.000003371051,0.0001003486,0.00001374584,0.000001078472,0.00001528956,0.0000118942,0.0002210661,0.997547,0.00007296287,0.00002152607,0.001981114],"study_design_scores_gemma":[0.000006629487,0.0001093122,0.002539085,0.000002551979,0.000003250598,0.000164252,0.0000138506,0.00312117,0.9928461,0.00008221089,0.001106903,0.000004776643],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9667353,0.0007108873,0.0302276,0.00002808191,0.0000248598,0.00003973736,0.00006325895,0.0002389543,0.001931252],"genre_scores_gemma":[0.9698906,0.0002742683,0.02841339,0.00001219732,0.00000496892,0.00001654862,0.00005297053,0.00002179145,0.001313293],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.0009580294,"threshold_uncertainty_score":0.001904905,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.006038315254593935,"score_gpt":0.2208910420101269,"score_spread":0.2148527267555329,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}