{"id":"W1996299322","doi":"10.1088/0960-1317/24/6/065021","title":"Fabrication of nanoelectromechanical systems via the integration of high surface area glancing angle deposition thin films","year":2014,"lang":"en","type":"article","venue":"Journal of Micromechanics and Microengineering","topic":"Mechanical and Optical Resonators","field":"Physics and Astronomy","cited_by":4,"is_retracted":false,"has_abstract":true,"ca_institutions":"National Institute for Nanotechnology; University of Alberta","funders":"","keywords":"Nanoelectromechanical systems; Materials science; Cantilever; Fabrication; Deposition (geology); Resonance (particle physics); Gravimetric analysis; Nanotechnology; Thin film; Stress (linguistics); Surface stress; Layer (electronics); Microelectromechanical systems; Optoelectronics; Composite material; Chemistry; Surface energy; Physics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0005210934,0.0001275431,0.0003347895,0.00006083821,0.00004463934,0.00002513925,0.0001565049,0.0000577011,0.00001402147],"category_scores_gemma":[0.00003341242,0.00008776811,0.0001098421,0.0001512586,0.00001298351,0.00008701329,0.00003930039,0.0002226745,4.89854e-7],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00001999481,"about_ca_system_score_gemma":0.00001845742,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00007382332,"about_ca_topic_score_gemma":8.933366e-7,"domain_scores_codex":[0.9989571,0.00004714856,0.0005631325,0.0001070872,0.0001677596,0.00015775],"domain_scores_gemma":[0.9989967,0.0001419916,0.000432263,0.0001287108,0.0002308783,0.0000694799],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00002045739,0.0000427872,0.00001565247,0.00004057038,0.00004531883,2.81622e-7,0.00006282737,0.001256796,0.9589591,0.03490397,0.00002490917,0.004627326],"study_design_scores_gemma":[0.000399775,0.0003273199,0.00006461627,0.0002633942,0.00007347822,0.00002716714,0.0001654512,0.1985721,0.7961217,0.003800302,0.00007202903,0.0001126527],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.5101711,0.0002351423,0.4893426,0.00003051363,0.0001442468,0.00005961784,0.000005442068,0.00000296366,0.000008367091],"genre_scores_gemma":[0.9946282,0.00003884365,0.005214034,0.000008442534,0.00007899186,0.000001320613,0.000005456887,0.00001348204,0.00001124762],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.4844571,"threshold_uncertainty_score":0.357908,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.005480801818722285,"score_gpt":0.189630235386518,"score_spread":0.1841494335677957,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}