{"id":"W1996722897","doi":"10.1109/tsm.2005.858518","title":"A Novel Approach for the Patterning and High-Volume Production of Sub-40-nm Gates","year":2005,"lang":"en","type":"article","venue":"IEEE Transactions on Semiconductor Manufacturing","topic":"Advancements in Photolithography Techniques","field":"Engineering","cited_by":20,"is_retracted":false,"has_abstract":true,"ca_institutions":"Advanced Micro Devices (Canada)","funders":"","keywords":"Resist; Logic gate; Materials science; Amorphous solid; Layer (electronics); Electronic engineering; Nanotechnology; Optoelectronics; Engineering; Chemistry; Crystallography","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001183214,0.0003486666,0.0003162617,0.0003197323,0.0003860492,0.0004283826,0.0006844361,0.0004253486,0.001562259],"category_scores_gemma":[0.00012487,0.0003142518,0.0002882981,0.0002140289,0.000293306,0.0004518347,0.0006328697,0.000699064,0.0007950788],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.000283368,"about_ca_system_score_gemma":0.000378388,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0002635359,"about_ca_topic_score_gemma":0.0007274335,"domain_scores_codex":[0.9997815,0.000007665702,0.000008479981,0.0000394438,0.0001401889,0.00002276872],"domain_scores_gemma":[0.9998997,0.0000141384,0.00002710154,0.00002371398,0.00001565268,0.00001969757],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00001119137,0.00001905617,0.00004401713,0.00003836416,0.000004130303,0.00007655739,0.00002409289,0.0001895689,0.9907445,0.001400283,0.0003573758,0.007090775],"study_design_scores_gemma":[0.00002448633,0.000233884,0.0005251887,0.000006812507,0.00001510494,0.0008804781,0.00001691218,0.004030868,0.9519436,0.001055549,0.04124374,0.00002335999],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"methods","genre_gemma":"empirical","genre_scores_codex":[0.4454302,0.00464077,0.4880854,0.001048403,0.0009277716,0.0006237222,0.0009580769,0.003518753,0.05476702],"genre_scores_gemma":[0.5336032,0.002326733,0.4445322,0.0002342931,0.0001340316,0.0003416485,0.0006209569,0.0002305397,0.01797641],"genre_candidate":"empirical","genre_consensus":null,"teacher_disagreement_score":0.001562259,"threshold_uncertainty_score":0.005226314,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01657734140735994,"score_gpt":0.2252234259068178,"score_spread":0.2086460844994578,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}