{"id":"W1996896446","doi":"10.1063/1.1330554","title":"Investigation of the gas pressure influence on patterned platinum etching characteristics using a high-density plasma","year":2001,"lang":"en","type":"article","venue":"Journal of Applied Physics","topic":"Plasma Diagnostics and Applications","field":"Engineering","cited_by":22,"is_retracted":false,"has_abstract":true,"ca_institutions":"Université de Montréal; Institut National de la Recherche Scientifique","funders":"Natural Sciences and Engineering Research Council of Canada","keywords":"Platinum; Sputtering; Etching (microfabrication); Reactive-ion etching; Plasma; Argon; Plasma etching; Materials science; Biasing; Analytical Chemistry (journal); Ion; Current density; Thin film; Chemistry; Voltage; Composite material; Nanotechnology; Electrical engineering","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00008616426,0.0001130813,0.0001907798,0.00002776875,0.00006426738,0.00002590404,0.0001761314,0.00005219938,0.000001468037],"category_scores_gemma":[0.0000198965,0.00009165218,0.00005148279,0.000163219,0.00003500953,0.00007627065,0.00002673622,0.0003035087,0.000002565582],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00003124104,"about_ca_system_score_gemma":0.00002842045,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.000006488873,"about_ca_topic_score_gemma":0.000001359267,"domain_scores_codex":[0.9992561,0.000009524043,0.0003266624,0.00006727451,0.000228653,0.0001117252],"domain_scores_gemma":[0.9992239,0.0001309644,0.0003403542,0.0001671026,0.00008767096,0.00004993513],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"simulation_or_modeling","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00002178467,0.00002516664,0.002290713,0.00004068072,0.0000584539,0.000002129922,0.0003569319,0.7520613,0.2402644,0.0031621,0.00007170642,0.00164463],"study_design_scores_gemma":[0.0006263466,0.00003941501,0.09844997,0.0003197386,0.0001910003,0.00002350075,0.00004290135,0.2565203,0.6280357,0.01520584,0.0002920952,0.0002532149],"study_design_candidate":"simulation_or_modeling","study_design_consensus":null,"genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9979726,0.000002186508,0.001594959,0.00003646749,0.0001201265,0.000101946,0.0000217016,0.00001349534,0.0001365153],"genre_scores_gemma":[0.9985183,0.00001877391,0.001159355,0.00006855129,0.000210405,0.000002239618,0.000002830835,0.00001817564,0.000001343424],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.495541,"threshold_uncertainty_score":0.3737468,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01376418495412691,"score_gpt":0.2038059831544445,"score_spread":0.1900417982003176,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}