{"id":"W1997118786","doi":"10.1364/oe.18.001872","title":"Direct patterning of silicon oxide on Si-substrate induced by femtosecond laser","year":2010,"lang":"en","type":"article","venue":"Optics Express","topic":"Laser Material Processing Techniques","field":"Engineering","cited_by":30,"is_retracted":false,"has_abstract":true,"ca_institutions":"Toronto Metropolitan University","funders":"","keywords":"Materials science; Femtosecond; Silicon; Scanning electron microscope; Optics; Silicon oxide; Substrate (aquarium); Laser; Raman spectroscopy; Optoelectronics; Oxide","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001137533,0.00017829,0.0002059196,0.00005326649,0.00003093976,0.00006984251,0.0002397427,0.0001541298,0.00006947912],"category_scores_gemma":[0.00003014221,0.0001773512,0.00003275233,0.00005632993,0.00003135101,0.0001373866,0.00004044459,0.0002611641,0.00001500481],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00001324763,"about_ca_system_score_gemma":0.000008196882,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00002311685,"about_ca_topic_score_gemma":0.000007364099,"domain_scores_codex":[0.9992301,0.00001390925,0.0002332287,0.0001740211,0.0001322913,0.0002164674],"domain_scores_gemma":[0.9994467,0.00005297855,0.00006280824,0.0003350645,0.0000375661,0.00006490127],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.000007890248,0.00002487959,0.00008025546,0.0001003835,0.00001313547,0.000002515076,0.00009148594,0.0003294202,0.9983116,0.00003718866,0.0005118934,0.0004893133],"study_design_scores_gemma":[0.0001507512,0.00003443001,0.0002035817,0.00007103929,0.000008026705,8.809055e-7,0.000008514153,0.001396002,0.9972663,0.000103891,0.0005601668,0.0001964284],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9886916,0.00001003621,0.0001734971,0.00000961259,0.0003139236,0.0000966942,0.00004845059,0.0004491764,0.01020701],"genre_scores_gemma":[0.9980094,0.000006161059,0.001717815,0.00003063458,0.00005782113,0.00002114325,0.000016897,0.00006157933,0.00007850142],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.01012851,"threshold_uncertainty_score":0.7232173,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01121138400092235,"score_gpt":0.2245486798899737,"score_spread":0.2133372958890514,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}