{"id":"W1997783441","doi":"10.1109/ipfa.2010.5532244","title":"Absorbed-specimen current imaging implementation and characterization in nano-prober for resistive interconnects isolation in 45-nm silicon-on-insulator microprocessors","year":2010,"lang":"en","type":"article","venue":"","topic":"Integrated Circuits and Semiconductor Failure Analysis","field":"Engineering","cited_by":2,"is_retracted":false,"has_abstract":true,"ca_institutions":"Advanced Micro Devices (Canada)","funders":"","keywords":"Materials science; Resistive touchscreen; Silicon; Absorbed dose; Silicon on insulator; Optoelectronics; Interconnection; Electron beam-induced current; Scanning electron microscope; Current (fluid); Characterization (materials science); Optics; Nanotechnology; Computer science; Electrical engineering; Composite material; Radiation","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0003509995,0.000278546,0.0002692583,0.000292678,0.0001684231,0.0003211854,0.00061354,0.0002990524,0.0009308183],"category_scores_gemma":[0.0008076821,0.0002252924,0.000163898,0.0001531109,0.0004114327,0.0007098801,0.0002519839,0.0002554276,0.0002220233],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0003265774,"about_ca_system_score_gemma":0.000204185,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0003748653,"about_ca_topic_score_gemma":0.0008776911,"domain_scores_codex":[0.9997662,0.00004594169,0.00001238293,0.00005412309,0.00009766157,0.00002370964],"domain_scores_gemma":[0.9993629,0.0002077154,0.0001368776,0.0001135594,0.0001442528,0.00003472398],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00005655071,0.00002075088,0.0006315704,0.00004728437,0.000004744203,0.00004591844,0.0001007868,0.0003809091,0.9940628,0.000204342,0.00003552541,0.004408814],"study_design_scores_gemma":[0.000005317599,0.0002213049,0.003305637,0.000003763578,0.000008365597,0.0001426582,0.00003562148,0.00614327,0.9894801,0.00003096415,0.0006111866,0.00001177724],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9358166,0.0003816122,0.0623385,0.00007034589,0.00001576274,0.00005481428,0.00006964937,0.0003630067,0.0008897198],"genre_scores_gemma":[0.9622102,0.0001191523,0.03671135,0.0000267032,0.000008832493,0.00003898774,0.00004963308,0.00004403529,0.0007910804],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.0009308183,"threshold_uncertainty_score":0.003113866,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.006836204399586146,"score_gpt":0.249713418283695,"score_spread":0.2428772138841089,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}