{"id":"W1998024038","doi":"10.1116/1.2902958","title":"Operational regimes of the saddle field plasma enhanced chemical vapor deposition system","year":2008,"lang":"en","type":"article","venue":"Journal of Vacuum Science & Technology A Vacuum Surfaces and Films","topic":"Thin-Film Transistor Technologies","field":"Engineering","cited_by":1,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Toronto","funders":"Natural Sciences and Engineering Research Council of Canada","keywords":"Plasma-enhanced chemical vapor deposition; Silane; Thin film; Materials science; Substrate (aquarium); Silicon; Chemical vapor deposition; Microcrystalline silicon; Plasma; Deposition (geology); Microcrystalline; Hydrogen; Analytical Chemistry (journal); Optoelectronics; Chemical engineering; Crystalline silicon; Nanotechnology; Chemistry; Composite material; Physics; Crystallography; Amorphous silicon","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0002975834,0.0001849887,0.0002673418,0.0003258338,0.0002892943,0.0004993632,0.000472607,0.000363851,0.00236364],"category_scores_gemma":[0.0007494686,0.0001525465,0.0001136833,0.0001677322,0.0004083692,0.0005230815,0.0003794222,0.0002753229,0.0004917465],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0003323469,"about_ca_system_score_gemma":0.0002165304,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0006049751,"about_ca_topic_score_gemma":0.0006376818,"domain_scores_codex":[0.9997527,0.00002844185,0.00002140827,0.00005675584,0.0000814083,0.00005921078],"domain_scores_gemma":[0.999561,0.0001875178,0.00005870351,0.00007917514,0.0000763533,0.00003712861],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.001082332,0.00009862672,0.007735987,0.0001122447,0.0000252551,0.0004372137,0.0007496634,0.004044752,0.9557609,0.005955189,0.0006895631,0.02330823],"study_design_scores_gemma":[0.0001383516,0.002155975,0.01749194,0.00003818208,0.00004411418,0.001182093,0.0003560607,0.09285938,0.8696003,0.003709805,0.01237151,0.00005221546],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9812965,0.0002274361,0.01258667,0.0001000536,0.00001296042,0.00004678822,0.0001310692,0.0004637033,0.005134819],"genre_scores_gemma":[0.998135,0.0000424009,0.001283954,0.00001763672,0.000004251317,0.0000161408,0.00005856444,0.00001102834,0.0004310037],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.00236364,"threshold_uncertainty_score":0.007907212,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.006462330723039709,"score_gpt":0.1926938981909668,"score_spread":0.1862315674679271,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}