{"id":"W1998060610","doi":"10.1021/la101521k","title":"Understanding Pattern Collapse in Photolithography Process Due to Capillary Forces","year":2010,"lang":"en","type":"article","venue":"Langmuir","topic":"Electronic Packaging and Soldering Technologies","field":"Engineering","cited_by":104,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Alberta","funders":"","keywords":"Curvature; Capillary action; Surface tension; Photolithography; Deformation (meteorology); Mechanics; Materials science; Scaling; Geometry; Optics; Physics; Mathematics; Composite material; Nanotechnology; Thermodynamics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001519377,0.000187894,0.0001372585,0.0001761261,0.0001848269,0.0002444008,0.0002923219,0.000407189,0.0006416405],"category_scores_gemma":[0.0004184854,0.0002048049,0.0002118304,0.0001549648,0.0003779756,0.0005515555,0.0002330961,0.0003803199,0.0001064222],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0005165014,"about_ca_system_score_gemma":0.0002511013,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00219966,"about_ca_topic_score_gemma":0.0009831851,"domain_scores_codex":[0.9998709,0.0000114707,0.000004765442,0.00002056894,0.0000662915,0.00002604501],"domain_scores_gemma":[0.9998765,0.00005295586,0.00002552369,0.00001603861,0.00002099189,0.000007954413],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.000126068,0.00007480243,0.004750827,0.0002086193,0.00003200034,0.0009408056,0.0004048956,0.1055508,0.8637984,0.007204496,0.0004756671,0.01643263],"study_design_scores_gemma":[0.00001417287,0.00007661464,0.008567154,0.00001092184,0.00001014636,0.0001980648,0.00007048903,0.7968928,0.1910775,0.002014069,0.001049694,0.00001838148],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9374092,0.0006846635,0.05689774,0.0001519664,0.00002253496,0.00004142127,0.0001142623,0.0003177499,0.004360401],"genre_scores_gemma":[0.9953727,0.000271693,0.003629756,0.00001967571,0.000003108272,0.00001650515,0.00004801524,0.00001983298,0.0006186665],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.00219966,"threshold_uncertainty_score":0.00437367,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.02149301863261131,"score_gpt":0.2336261640482712,"score_spread":0.2121331454156599,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}