{"id":"W1998060610","doi":"10.1021/la101521k","title":"Understanding Pattern Collapse in Photolithography Process Due to Capillary Forces","year":2010,"lang":"en","type":"article","venue":"Langmuir","topic":"Electronic Packaging and Soldering Technologies","field":"Engineering","cited_by":104,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Alberta","funders":"","keywords":"Curvature; Capillary action; Surface tension; Photolithography; Deformation (meteorology); Mechanics; Materials science; Scaling; Geometry; Optics; Physics; Mathematics; Composite material; Nanotechnology; Thermodynamics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00007716032,0.0001120108,0.0001351358,0.0002161892,0.00004337206,0.00002857189,0.0001744471,0.00009676163,0.000008196912],"category_scores_gemma":[0.00001364632,0.0001093716,0.00002546924,0.0003729523,0.00002371514,0.00005081328,0.00002167138,0.0002752942,0.000009157864],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00004516532,"about_ca_system_score_gemma":0.000008020968,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00003809745,"about_ca_topic_score_gemma":0.0008507938,"domain_scores_codex":[0.9993569,0.000004722675,0.00009972036,0.0001339589,0.00008142799,0.0003232524],"domain_scores_gemma":[0.9997635,0.00002080251,0.00001006292,0.0001616891,0.000007544742,0.00003634199],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"observational","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00007776447,0.000326802,0.5110313,0.003193178,0.0004918217,0.001838932,0.03761104,0.01818225,0.3407376,0.02768761,0.02465233,0.03416946],"study_design_scores_gemma":[0.005167552,0.0005995742,0.1691107,0.001144173,0.00009475423,0.0008156899,0.01841958,0.07897964,0.5980164,0.09158005,0.02995803,0.0061138],"study_design_candidate":"bench_or_experimental","study_design_consensus":null,"genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9923111,0.0001049649,0.003458422,0.0002055476,0.0001537796,0.0001151515,0.000003813994,0.0009482771,0.002698974],"genre_scores_gemma":[0.9996327,0.00001199827,0.0001929508,0.00004623567,0.00003041154,0.00003934628,0.00000274803,0.0000246458,0.00001899012],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.3419206,"threshold_uncertainty_score":0.4460047,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.02149301863261131,"score_gpt":0.2336261640482712,"score_spread":0.2121331454156599,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}