{"id":"W1998182842","doi":"10.1007/s00542-015-2416-8","title":"Fabrication and characterization of sealed cavities realized by adhesive wafer bonding with dry etched Cyclotene™","year":2015,"lang":"en","type":"article","venue":"Microsystem Technologies","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":11,"is_retracted":false,"has_abstract":false,"ca_institutions":"University of Windsor; Western University","funders":"","keywords":"Wafer; Materials science; Microelectromechanical systems; Fabrication; Microelectronics; Wafer bonding; Silicon on insulator; Adhesive; Optoelectronics; Anodic bonding; Capacitive micromachined ultrasonic transducers; Capacitive sensing; Layer (electronics); Adhesive bonding; Ultrasonic sensor; Composite material; Die preparation; Wire bonding; Silicon; Wafer dicing; Electrical engineering; Piezoelectricity; Acoustics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0004989414,0.0004222637,0.0006915798,0.0002950229,0.0003920794,0.000423647,0.001054649,0.0008286849,0.0015563],"category_scores_gemma":[0.0008863998,0.0005549327,0.0003304074,0.0002050505,0.0003688512,0.0003409575,0.000360379,0.000419373,0.000681462],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002260873,"about_ca_system_score_gemma":0.0003921401,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.000514004,"about_ca_topic_score_gemma":0.0009685446,"domain_scores_codex":[0.9995853,0.00002021236,0.00002127038,0.0001210267,0.0001838192,0.00006829123],"domain_scores_gemma":[0.9993901,0.0001119765,0.0001869793,0.0001373962,0.0001344777,0.00003910764],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00005105856,0.00001430888,0.0001683319,0.00006387191,0.000007920176,0.00006873603,0.00008010415,0.00007535474,0.9977429,0.00008922494,0.0001528301,0.001485339],"study_design_scores_gemma":[0.00002613429,0.0003375281,0.004906603,0.000008020329,0.00002077117,0.0001538697,0.00003479523,0.001519131,0.9896635,0.00003749449,0.003273985,0.00001807407],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9697055,0.0009195913,0.0254931,0.0001093607,0.0001672272,0.0001864865,0.0006991633,0.0008009096,0.001918631],"genre_scores_gemma":[0.9608211,0.0003468252,0.03532002,0.00006163491,0.00003580464,0.0001969873,0.0003591492,0.0000855698,0.002772835],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.0015563,"threshold_uncertainty_score":0.005206347,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.009075046307296039,"score_gpt":0.1998493100971905,"score_spread":0.1907742637898944,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}