{"id":"W1998233388","doi":"10.1016/j.proeng.2012.09.204","title":"Capacitive Micromachined Ultrasonic Transducer Array with Pencil Beam Shape and Wide Range Beam Steering","year":2012,"lang":"en","type":"article","venue":"Procedia Engineering","topic":"Ultrasonics and Acoustic Wave Propagation","field":"Engineering","cited_by":3,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Manitoba","funders":"Natural Sciences and Engineering Research Council of Canada; CMC Microsystems","keywords":"Capacitive micromachined ultrasonic transducers; Transducer; Beam steering; Capacitive sensing; Materials science; Ultrasonic sensor; Acoustics; Pencil (optics); Beam (structure); Surface micromachining; Optics; Engineering; Electrical engineering; Physics; Fabrication","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0003233616,0.0005313035,0.0004937723,0.0002705452,0.0001291876,0.0005419122,0.001103421,0.0007703912,0.001151423],"category_scores_gemma":[0.0007790316,0.0004310242,0.0002144816,0.0004605352,0.0003214264,0.0005533406,0.0005032432,0.0003358055,0.000531384],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0004221375,"about_ca_system_score_gemma":0.0004739019,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0005255883,"about_ca_topic_score_gemma":0.001043032,"domain_scores_codex":[0.9992914,0.00007672229,0.00004223593,0.00018595,0.000350985,0.00005267733],"domain_scores_gemma":[0.9995565,0.00008967641,0.00009701067,0.00005531204,0.0001583252,0.00004319504],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00003662609,0.000009611569,0.0001215188,0.0000468706,0.000004059425,0.00005669477,0.00001770725,0.0004738876,0.9883023,0.0003807391,0.0002417248,0.01030834],"study_design_scores_gemma":[0.00003417978,0.0001929261,0.0007794851,0.000007257237,0.00001083501,0.000574391,0.00001919097,0.02480394,0.9688342,0.00009738027,0.004616079,0.00003019918],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"methods","genre_gemma":"empirical","genre_scores_codex":[0.2951947,0.002010888,0.6882929,0.0006676629,0.0006621814,0.0003200201,0.0004002152,0.00254031,0.00991111],"genre_scores_gemma":[0.5428776,0.0004661102,0.4507357,0.0003267844,0.0001109319,0.0001405,0.0002082171,0.00005992144,0.00507417],"genre_candidate":"empirical","genre_consensus":null,"teacher_disagreement_score":0.001151423,"threshold_uncertainty_score":0.003851831,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.005432135410990144,"score_gpt":0.1653073022493181,"score_spread":0.1598751668383279,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}