{"id":"W1998853872","doi":"10.1016/j.saa.2014.10.029","title":"An investigation on the effect of high partial pressure of hydrogen on the nanocrystalline structure of silicon carbide thin films prepared by radio-frequency magnetron sputtering","year":2014,"lang":"en","type":"article","venue":"Spectrochimica Acta Part A Molecular and Biomolecular Spectroscopy","topic":"Diamond and Carbon-based Materials Research","field":"Materials Science","cited_by":12,"is_retracted":false,"has_abstract":false,"ca_institutions":"Alberta Glycomics Centre; University of Alberta","funders":"","keywords":"Materials science; Raman spectroscopy; Thin film; Analytical Chemistry (journal); Nanocrystalline silicon; Nanocrystalline material; Silicon; Sputter deposition; Amorphous solid; Hydrogen; Amorphous silicon; Sputtering; Crystallography; Crystalline silicon; Nanotechnology; Chemistry; Organic chemistry; Metallurgy; Optics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001043315,0.0001228093,0.000166618,0.00008486638,0.0002136927,0.0001919237,0.000230909,0.0002372251,0.001094608],"category_scores_gemma":[0.0003093144,0.0001927057,0.0001103051,0.000118002,0.0002434396,0.0002069804,0.0001083396,0.0002875205,0.00009083791],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001576436,"about_ca_system_score_gemma":0.0001362142,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0009118614,"about_ca_topic_score_gemma":0.001168682,"domain_scores_codex":[0.9999217,0.000008826207,0.000004086624,0.00001510174,0.00003360208,0.00001673259],"domain_scores_gemma":[0.9997804,0.0001168195,0.00003590744,0.00001778547,0.00003524034,0.00001394202],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0001531299,0.000008647544,0.0003464116,0.00005088123,0.000008974999,0.0001086641,0.00003697398,0.00006965645,0.9982481,0.00004530276,0.0000325852,0.000890646],"study_design_scores_gemma":[0.00001153763,0.0001465777,0.003525037,0.000002346644,0.00001179274,0.00009053462,0.00003645421,0.0006629498,0.9951055,0.00001299333,0.0003915967,0.000002740186],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9986483,0.0004444408,0.0002754173,0.00003695372,0.000008655467,0.000004315375,0.00005012513,0.000009370428,0.0005222377],"genre_scores_gemma":[0.9990847,0.0002607348,0.0002971362,0.00001268873,0.000006104023,0.00000347809,0.00004800009,0.000006920552,0.0002801897],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001094608,"threshold_uncertainty_score":0.003661811,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.004325670507866045,"score_gpt":0.221707092804542,"score_spread":0.217381422296676,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}