{"id":"W1999414467","doi":"10.1116/1.1464840","title":"Growth and characterization of ultrahigh vacuum/chemical vapor deposition SiGe epitaxial layers on bulk single-crystal SiGe and Si substrates","year":2002,"lang":"en","type":"article","venue":"Journal of Vacuum Science & Technology A Vacuum Surfaces and Films","topic":"Semiconductor Quantum Structures and Devices","field":"Physics and Astronomy","cited_by":12,"is_retracted":false,"has_abstract":true,"ca_institutions":"National Research Council Canada; ON Semiconductor (Canada); Institute for Microstructural Sciences","funders":"Air Force Office of Scientific Research; Natural Sciences and Engineering Research Council of Canada; Multidisciplinary University Research Initiative; U.S. Air Force","keywords":"Materials science; Chemical vapor deposition; Epitaxy; Photoluminescence; Auger electron spectroscopy; Transmission electron microscopy; Optoelectronics; Surface roughness; Single crystal; Layer (electronics); Crystallography; Analytical Chemistry (journal); Nanotechnology; Chemistry; Composite material","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001245727,0.0001908621,0.0002460909,0.0001816923,0.0001409979,0.0002584991,0.0002170412,0.0001771558,0.0005701924],"category_scores_gemma":[0.0002521901,0.0001849608,0.00009983403,0.0002182356,0.00012564,0.000156298,0.0001030752,0.0001643104,0.0001711059],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001659938,"about_ca_system_score_gemma":0.000160236,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0009764987,"about_ca_topic_score_gemma":0.001806402,"domain_scores_codex":[0.999885,0.000007389148,0.000008057445,0.00002043726,0.00006237833,0.00001677806],"domain_scores_gemma":[0.9998091,0.00003854177,0.00003033258,0.00003271668,0.00006974841,0.00001972616],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.000016557,0.000005480117,0.0003709617,0.00004090216,0.000004192205,0.00004863319,0.00001276907,0.0001209426,0.9983663,0.00002693788,0.00003946851,0.0009468995],"study_design_scores_gemma":[0.000009234245,0.0001423144,0.01421692,0.000006043884,0.00001347447,0.0001981306,0.00005152969,0.001964007,0.9815422,0.00002548687,0.001824386,0.0000063249],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9949933,0.000713401,0.002787873,0.00002689654,0.00001757432,0.00002271964,0.0004856338,0.00004823288,0.0009044654],"genre_scores_gemma":[0.9849049,0.0007433958,0.01182526,0.00002390394,0.00000877969,0.00003853016,0.0008906494,0.00003315526,0.001531224],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.0009764987,"threshold_uncertainty_score":0.001941621,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01088167328689988,"score_gpt":0.213982421552754,"score_spread":0.2031007482658541,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}