{"id":"W1999940918","doi":"10.4028/www.scientific.net/ssp.103-104.255","title":"The Degradation Prevention of Resin Materials for Semiconductor Manufacturing Equipment by Applying the Ultra-High Purity Gas Supply Technology","year":2005,"lang":"en","type":"article","venue":"Diffusion and defect data, solid state data. Part B, Solid state phenomena/Solid state phenomena","topic":"High-Temperature Coating Behaviors","field":"Engineering","cited_by":1,"is_retracted":false,"has_abstract":true,"ca_institutions":"Hatch (Canada)","funders":"","keywords":"Materials science; Degradation (telecommunications); Semiconductor; Semiconductor device fabrication; Process engineering; Engineering physics; Metallurgy; Nanotechnology; Optoelectronics; Electrical engineering; Engineering","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0003156601,0.0003135169,0.0001866433,0.0002640452,0.000215048,0.0002658638,0.0003068475,0.0002976723,0.0006496345],"category_scores_gemma":[0.0005077159,0.0001639585,0.000239207,0.000130332,0.0002814464,0.0003035256,0.0001901959,0.0004627584,0.0002156307],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0003395341,"about_ca_system_score_gemma":0.0003838139,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0007692387,"about_ca_topic_score_gemma":0.00173391,"domain_scores_codex":[0.9996471,0.0000435122,0.0000220645,0.00005055963,0.000197849,0.00003895153],"domain_scores_gemma":[0.9995099,0.00007530276,0.0001502292,0.00005981479,0.0001793399,0.00002536614],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00001587397,0.000008767335,0.0003943909,0.00009267966,0.000003342661,0.00002513653,0.00003377072,0.00009284935,0.9935192,0.0001724275,0.00005589893,0.005585657],"study_design_scores_gemma":[0.000001143937,0.00008036084,0.001179974,0.0000030955,0.000004609674,0.00006959607,0.000009767162,0.0002841639,0.9969008,0.00001709909,0.001447247,0.000002131932],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.8874971,0.00568364,0.1025694,0.0002821769,0.00008823708,0.00009143566,0.0001546808,0.0004505483,0.003182826],"genre_scores_gemma":[0.9535213,0.001533144,0.0420201,0.00008463445,0.00001904643,0.00003861637,0.0001924922,0.00007565233,0.002514896],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.0007692387,"threshold_uncertainty_score":0.00246352,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.02412194511720059,"score_gpt":0.2833414395285842,"score_spread":0.2592194944113836,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}