{"id":"W2001994255","doi":"10.1109/tmtt.2009.2033850","title":"Monolithically Integrated Multiport RF MEMS Switch Matrices","year":2009,"lang":"en","type":"article","venue":"IEEE Transactions on Microwave Theory and Techniques","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":18,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Waterloo","funders":"","keywords":"Insertion loss; Materials science; RF switch; Radio frequency; Coplanar waveguide; Microelectromechanical systems; Electrical engineering; Optoelectronics; Transmission line; Electric power transmission; Wafer; Microwave; Computer science; Engineering; Telecommunications","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.000154864,0.000394891,0.0001987891,0.0002411289,0.0002500139,0.0004720283,0.0007185586,0.000347289,0.001901774],"category_scores_gemma":[0.0001650355,0.0002411792,0.0002208831,0.0002162102,0.0001548496,0.0004915485,0.0004085801,0.0003857441,0.0006937433],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0003498384,"about_ca_system_score_gemma":0.0001889844,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0003229918,"about_ca_topic_score_gemma":0.0007601539,"domain_scores_codex":[0.9997284,0.00002219013,0.000009247988,0.0000552136,0.0001527455,0.00003212354],"domain_scores_gemma":[0.9998342,0.00002470678,0.00004890786,0.00002499048,0.00004372523,0.00002345151],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00004765688,0.00004951025,0.0002316398,0.00004877828,0.00001274141,0.000077791,0.00002472689,0.001462454,0.98742,0.001039738,0.0003556237,0.0092294],"study_design_scores_gemma":[0.0000320399,0.0006533642,0.001890869,0.000004844061,0.00002281499,0.0003522987,0.00002457129,0.01867376,0.9683072,0.0001991219,0.009822555,0.00001655597],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.8636951,0.001405556,0.1167793,0.0002969511,0.0002592498,0.0001951202,0.0004820208,0.001808574,0.01507804],"genre_scores_gemma":[0.8909793,0.0003163194,0.1022294,0.00005356211,0.00005910291,0.0001216371,0.0003308505,0.00005051359,0.005859294],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001901774,"threshold_uncertainty_score":0.006362081,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.007071678032127536,"score_gpt":0.2314002955213589,"score_spread":0.2243286174892313,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}