{"id":"W2002977263","doi":"10.1139/cjp-2013-0627","title":"Impact of doped microcrystalline silicon oxide layers on crystalline silicon surface passivation","year":2014,"lang":"en","type":"article","venue":"Canadian Journal of Physics","topic":"Thin-Film Transistor Technologies","field":"Engineering","cited_by":11,"is_retracted":false,"has_abstract":true,"ca_institutions":"","funders":"","keywords":"Passivation; Doping; Silicon; Microcrystalline; Materials science; Boron; Wafer; Crystalline silicon; Oxide thin-film transistor; Impurity; Layer (electronics); Silicon oxide; Oxide; Analytical Chemistry (journal); Chemical engineering; Nanotechnology; Optoelectronics; Crystallography; Metallurgy; Silicon nitride; Chemistry","routes":{"ca_aff":false,"ca_fund":false,"ca_venue":true,"about_ca":false,"invisible_to_affiliation_only":true},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001505668,0.0002649374,0.000340057,0.0002048056,0.0001675527,0.0004046288,0.0002194429,0.000313002,0.001301439],"category_scores_gemma":[0.0003992002,0.000202885,0.0002380044,0.000141018,0.0002263957,0.000211904,0.0002064481,0.0002452869,0.0001498424],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002670326,"about_ca_system_score_gemma":0.000215857,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.001386185,"about_ca_topic_score_gemma":0.0027156,"domain_scores_codex":[0.9997987,0.00001708914,0.00001091554,0.00004001622,0.00008026133,0.0000530707],"domain_scores_gemma":[0.9996303,0.0001848821,0.00006749364,0.00003237454,0.00005796245,0.00002701382],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0001429388,0.00001082533,0.001087759,0.00009417892,0.00003143397,0.0000749171,0.00003704537,0.0003739524,0.9960254,0.00003591063,0.00002339595,0.002062113],"study_design_scores_gemma":[0.000006989541,0.000371592,0.006669395,0.000007889054,0.00003454975,0.00008519107,0.0000517695,0.0005554478,0.9916751,0.00001595325,0.0005219855,0.000004161341],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9970963,0.001543354,0.0003660826,0.00001990639,0.00001545528,0.00001043832,0.0001069497,0.00002045398,0.0008209601],"genre_scores_gemma":[0.998256,0.0006626426,0.000489946,0.00001676236,0.000003930615,0.000004170004,0.0000778271,0.00001250463,0.000476221],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001386185,"threshold_uncertainty_score":0.004353762,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01033851953814537,"score_gpt":0.2104113267016654,"score_spread":0.20007280716352,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}