{"id":"W2003087428","doi":"10.1088/0960-1317/23/8/085005","title":"Stress anisotropy compensation of the sputter-deposited metal thin films by variable bias voltage","year":2013,"lang":"en","type":"article","venue":"Journal of Micromechanics and Microengineering","topic":"Metal and Thin Film Mechanics","field":"Engineering","cited_by":3,"is_retracted":false,"has_abstract":true,"ca_institutions":"Simon Fraser University","funders":"","keywords":"Compensation (psychology); Materials science; Sputtering; Biasing; Stress (linguistics); Thin film; Anisotropy; Voltage; Optoelectronics; Composite material; Sputter deposition; Optics; Electrical engineering; Engineering; Nanotechnology; Physics; Psychology","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0002581069,0.000210873,0.0003659504,0.0001161094,0.00005221276,0.00006434811,0.0002750635,0.0001027299,0.00007550827],"category_scores_gemma":[0.00002585508,0.0001575718,0.0001271556,0.0002181861,0.00001247346,0.0002313682,0.00008121426,0.0003390599,0.000003486665],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.000031931,"about_ca_system_score_gemma":0.00001366653,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00002727612,"about_ca_topic_score_gemma":0.000001034775,"domain_scores_codex":[0.998874,0.00002249319,0.0005699405,0.0001053062,0.0001930936,0.0002351543],"domain_scores_gemma":[0.9993437,0.00002971457,0.000221779,0.0001791533,0.0001328944,0.00009279004],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.000003247961,0.00002498789,0.00001711517,0.0001435859,0.0001209147,0.000002235844,0.0001063178,0.001965853,0.99471,0.0008449818,0.001711233,0.0003494777],"study_design_scores_gemma":[0.0004493609,0.00007906834,0.0000586782,0.0002077435,0.0000814041,0.0001773717,0.0001071969,0.1180828,0.8783896,0.0004799715,0.001698262,0.0001885571],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.8954041,0.002412169,0.100385,0.00003045134,0.001465548,0.0001761229,0.00005492636,0.00003404126,0.00003763604],"genre_scores_gemma":[0.9893059,0.0004213879,0.009957407,0.00004002735,0.00005173745,0.00000255574,0.000006420307,0.00004831477,0.0001663208],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.1163204,"threshold_uncertainty_score":0.642559,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.006919353873813818,"score_gpt":0.1640142590429464,"score_spread":0.1570949051691326,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}