{"id":"W2003288341","doi":"10.1088/0957-4484/25/17/175301","title":"Nanofabrication of high aspect ratio structures using an evaporated resist containing metal","year":2014,"lang":"en","type":"article","venue":"Nanotechnology","topic":"Advancements in Photolithography Techniques","field":"Engineering","cited_by":25,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Waterloo","funders":"Oxford Cancer Imaging Centre; Engineering and Physical Sciences Research Council","keywords":"Resist; Materials science; Nanolithography; Polystyrene; Etching (microfabrication); Silicon; Substrate (aquarium); Raman spectroscopy; Evaporation; Nanotechnology; Dry etching; Reactive-ion etching; Layer (electronics); Optoelectronics; Composite material; Fabrication; Optics; Polymer","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001084595,0.000378159,0.0001512446,0.000161065,0.0002105642,0.0002288793,0.0002971876,0.0003362943,0.0009330955],"category_scores_gemma":[0.0002021792,0.0002436151,0.0002113346,0.00009766314,0.0001680011,0.0002487406,0.000196663,0.0003877693,0.00038109],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002005329,"about_ca_system_score_gemma":0.0001111589,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0002516379,"about_ca_topic_score_gemma":0.0009159938,"domain_scores_codex":[0.9998876,0.00000685107,0.00000829337,0.00003624448,0.00004127097,0.00001975469],"domain_scores_gemma":[0.9998443,0.00004285366,0.00004838302,0.00003017997,0.00002397734,0.00001025364],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.000003088741,0.000002625413,0.0000197444,0.00001560361,0.000001496689,0.00002204115,0.000008702947,0.00001078833,0.9993507,0.0000446852,0.00001242518,0.0005080021],"study_design_scores_gemma":[0.00000434721,0.00004367208,0.0008475736,0.000002653357,0.000004191378,0.0001674986,0.0000099699,0.0003033731,0.9975556,0.00003926469,0.001018531,0.000003335987],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9610621,0.000875751,0.03301799,0.0001211603,0.00009179337,0.00006961328,0.0002213382,0.000373868,0.004166318],"genre_scores_gemma":[0.9483906,0.0005083352,0.04725697,0.00006684109,0.00002029222,0.00005508716,0.0002699081,0.00007964206,0.003352418],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.0009330955,"threshold_uncertainty_score":0.003121495,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01434628773991742,"score_gpt":0.261462390121964,"score_spread":0.2471161023820466,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}