{"id":"W2003420320","doi":"10.1088/0960-1317/19/6/065015","title":"Solving the shrinkage-induced PDMS alignment registration issue in multilayer soft lithography","year":2009,"lang":"en","type":"article","venue":"Journal of Micromechanics and Microengineering","topic":"Nanofabrication and Lithography Techniques","field":"Engineering","cited_by":80,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Toronto","funders":"Canadian Institutes of Health Research; University of Toronto; Natural Sciences and Engineering Research Council of Canada; Canada Research Chairs","keywords":"Fabrication; Polydimethylsiloxane; Materials science; Soft lithography; Lithography; Microfabrication; Photolithography; Optoelectronics; Nanotechnology; Shrinkage; Composite material","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0004542209,0.0001744632,0.0002200354,0.0003726984,0.00004433027,0.00007417165,0.0001786932,0.00008318704,0.000005754862],"category_scores_gemma":[0.00001494607,0.0001419751,0.0001104748,0.0003291459,0.000007750462,0.0001625299,0.00001363088,0.0003065749,6.074669e-7],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00004453272,"about_ca_system_score_gemma":0.000009558923,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.000003520471,"about_ca_topic_score_gemma":0.000002025597,"domain_scores_codex":[0.9990373,0.00001689282,0.000484319,0.0001077634,0.0001281812,0.0002255771],"domain_scores_gemma":[0.9995728,0.00003160823,0.0001160613,0.0001548664,0.00005422004,0.00007041189],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.000005499533,0.00002617919,0.00003192858,0.0000274544,0.00002422444,0.00001221633,0.0004400702,0.0006978491,0.9705789,0.0003683146,0.0004767792,0.02731056],"study_design_scores_gemma":[0.001692879,0.0005459364,0.005903091,0.000833894,0.00009651965,0.0007725483,0.0007685969,0.04645317,0.8645713,0.001650606,0.07579057,0.0009209205],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.8379765,0.009200019,0.1502409,0.000990128,0.0006537312,0.0004187608,0.000006700646,0.0002189047,0.0002944016],"genre_scores_gemma":[0.9894206,0.001869947,0.008473785,0.0001018949,0.00009362783,0.000003295424,7.339834e-7,0.00002085706,0.00001526756],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.1514441,"threshold_uncertainty_score":0.5789577,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.005819313422763274,"score_gpt":0.2086785051545058,"score_spread":0.2028591917317425,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}