{"id":"W2003985338","doi":"10.1116/1.1366704","title":"Scanning spreading resistance microscopy study of a metalorganic chemical vapor deposited grown InP optoelectronic structure","year":2001,"lang":"en","type":"article","venue":"Journal of Vacuum Science & Technology A Vacuum Surfaces and Films","topic":"Force Microscopy Techniques and Applications","field":"Physics and Astronomy","cited_by":33,"is_retracted":false,"has_abstract":true,"ca_institutions":"Nortel (Canada)","funders":"","keywords":"Spreading resistance profiling; Materials science; Secondary ion mass spectrometry; Chemical vapor deposition; Microscopy; Dopant; Optoelectronics; Semiconductor; Analytical Chemistry (journal); Resolution (logic); Optical microscope; Metalorganic vapour phase epitaxy; Mass spectrometry; Layer (electronics); Scanning electron microscope; Chemistry; Nanotechnology; Optics; Doping; Epitaxy; Composite material","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0003717577,0.0002503649,0.0005240297,0.0005745188,0.0003813301,0.0001195032,0.0008645018,0.0001251423,0.00006544495],"category_scores_gemma":[0.00001427365,0.0002053017,0.0000882385,0.002355101,0.0005837145,0.0004379126,0.0002211918,0.0005960066,9.809057e-7],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00005625594,"about_ca_system_score_gemma":0.0001752905,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00003852968,"about_ca_topic_score_gemma":0.000006344328,"domain_scores_codex":[0.9981112,0.00001797877,0.0006811671,0.0003935149,0.0003013008,0.0004947693],"domain_scores_gemma":[0.9984508,0.00003484019,0.0007351363,0.0003636285,0.0003004435,0.0001151764],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0000423827,0.0002109534,0.04531133,0.000008192761,0.00006409569,0.000004556613,0.0003457534,0.00001203612,0.9522375,0.00134417,0.00007860323,0.0003404511],"study_design_scores_gemma":[0.00096094,0.0006793986,0.002082259,0.0001263233,0.0001395371,0.0001273033,0.003677479,0.000341113,0.9868612,0.004180375,0.0005072334,0.0003168986],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9959421,0.0008116057,0.002490579,0.0002610642,0.00005772084,0.0002853454,0.00001913121,0.00004299085,0.00008942703],"genre_scores_gemma":[0.9903885,0.00004372653,0.009432883,0.00001266765,0.00002633106,0.000007749451,0.000001978102,0.00001902491,0.00006714125],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.04322907,"threshold_uncertainty_score":0.8371961,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.005289444774148223,"score_gpt":0.2703993133337034,"score_spread":0.2651098685595552,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}