{"id":"W2004509228","doi":"10.1088/0957-4484/23/1/015307","title":"Fabrication of vertically stacked single-crystalline Si nanowires using self-limiting oxidation","year":2011,"lang":"en","type":"article","venue":"Nanotechnology","topic":"Nanowire Synthesis and Applications","field":"Engineering","cited_by":7,"is_retracted":false,"has_abstract":true,"ca_institutions":"McMaster University","funders":"Zhejiang University; National Natural Science Foundation of China","keywords":"Materials science; Nanowire; Fabrication; Wafer; Etching (microfabrication); Silicon; Limiting; Stack (abstract data type); Inductively coupled plasma; Optoelectronics; Nanotechnology; Silicon nanowires; Plasma etching; Plasma; Layer (electronics)","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00007914075,0.0003119941,0.0002402809,0.0001353501,0.0002197247,0.0003066284,0.0003604378,0.0002806995,0.0005181103],"category_scores_gemma":[0.0001175473,0.0003690186,0.0002568191,0.0001487918,0.0001102248,0.0002268499,0.0002805368,0.000378418,0.0004082501],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001741497,"about_ca_system_score_gemma":0.0002479238,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0004106696,"about_ca_topic_score_gemma":0.001537025,"domain_scores_codex":[0.9999059,0.000003719989,0.000007914904,0.00002420386,0.00004608732,0.00001207153],"domain_scores_gemma":[0.9999232,0.00001058389,0.00001729112,0.0000157499,0.00002022277,0.00001290358],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.000005438364,0.000007312078,0.00008937104,0.0000371592,0.000005042335,0.00005506437,0.00001282642,0.0003676834,0.9958716,0.0003392661,0.0001129694,0.003096364],"study_design_scores_gemma":[0.000003967958,0.00006202782,0.0005233833,0.000004432449,0.00000675161,0.0001267855,0.00000981534,0.0046822,0.9920541,0.00009384599,0.002427027,0.00000564237],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.8964601,0.001388004,0.08552156,0.0001499692,0.0003379663,0.0001066505,0.0005587566,0.0007496821,0.01472726],"genre_scores_gemma":[0.8537896,0.001233384,0.1373538,0.00006226741,0.00003375632,0.0001231537,0.0006639921,0.00007972489,0.006660375],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.0005181103,"threshold_uncertainty_score":0.001733243,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.03028213237119573,"score_gpt":0.2190045608277383,"score_spread":0.1887224284565426,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}