{"id":"W2004547698","doi":"10.1088/0022-3727/47/34/345104","title":"Polarization charge properties of low-temperature atomic layer deposition of AlN on GaN","year":2014,"lang":"en","type":"article","venue":"Journal of Physics D Applied Physics","topic":"GaN-based semiconductor devices and materials","field":"Physics and Astronomy","cited_by":4,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Alberta","funders":"","keywords":"Atomic layer deposition; Materials science; Optoelectronics; Layer (electronics); Deposition (geology); Charge (physics); Nanotechnology; Physics; Geology","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00008674333,0.0001544309,0.0001133808,0.0001410966,0.0001140677,0.0002648078,0.0002111501,0.0001640101,0.001403903],"category_scores_gemma":[0.0002804291,0.0001013257,0.0001204671,0.0001236905,0.0001417278,0.0001668945,0.0001139481,0.0001764703,0.0002199461],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00030243,"about_ca_system_score_gemma":0.00009169638,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.001813664,"about_ca_topic_score_gemma":0.001746152,"domain_scores_codex":[0.9999133,0.000007265554,0.000002726678,0.00001656166,0.00003723966,0.00002286227],"domain_scores_gemma":[0.9998521,0.00003966318,0.00003472368,0.0000163363,0.00004103231,0.00001624127],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00009142786,0.00001152469,0.0006305987,0.00002882219,0.000005987509,0.00004651238,0.00003138436,0.0003035891,0.9977965,0.00007101035,0.00006154682,0.0009210967],"study_design_scores_gemma":[0.00001255962,0.0002234037,0.01140841,0.000007483488,0.00001200139,0.00008801124,0.00004579574,0.004758789,0.9827678,0.00003375121,0.0006347721,0.000007323447],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9985563,0.0001594751,0.0002265245,0.00001424768,0.000007665294,0.000002503587,0.00009054853,0.0000115478,0.000931285],"genre_scores_gemma":[0.9991265,0.00007307395,0.0001499005,0.000007178481,0.000003327234,0.000002088145,0.0000773193,0.000005173865,0.0005553349],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001813664,"threshold_uncertainty_score":0.004696488,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01124944984107016,"score_gpt":0.2131325944845843,"score_spread":0.2018831446435141,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}