{"id":"W2004616251","doi":"10.1116/1.2202128","title":"Effect of oxygen incorporation on structural and properties of Ti–Si–N nanocomposite coatings deposited by reactive unbalanced magnetron sputtering","year":2006,"lang":"en","type":"article","venue":"Journal of Vacuum Science & Technology A Vacuum Surfaces and Films","topic":"Metal and Thin Film Mechanics","field":"Engineering","cited_by":7,"is_retracted":false,"has_abstract":true,"ca_institutions":"National Research Council Canada","funders":"","keywords":"Materials science; Tribometer; Nanocomposite; Coating; Nanoindentation; Sputter deposition; Oxygen; Rutile; Tin; Tribology; Metallurgy; Sputtering; Phase (matter); Composite material; Analytical Chemistry (journal); Chemical engineering; Thin film; Nanotechnology; Chemistry","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001327234,0.0004063999,0.0002367285,0.0002279996,0.000120931,0.0002462636,0.0002304046,0.0002619619,0.0004508675],"category_scores_gemma":[0.0003025785,0.0002671584,0.0002003704,0.0001921938,0.0001480861,0.0002229941,0.0001715413,0.0002496759,0.00008173152],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.000211113,"about_ca_system_score_gemma":0.0001276392,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.001398187,"about_ca_topic_score_gemma":0.003488004,"domain_scores_codex":[0.9998506,0.000009136588,0.0000147767,0.00004007765,0.0000553518,0.00003008952],"domain_scores_gemma":[0.9998405,0.00002600039,0.0000480266,0.000009859678,0.00004769059,0.00002786026],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00005213193,0.000005091373,0.0001073539,0.00002993034,0.000003664759,0.00001952568,0.00001077529,0.00004412332,0.9992398,0.000006443038,0.000005310295,0.0004757704],"study_design_scores_gemma":[0.000009328107,0.0001357455,0.003555711,0.000004575105,0.00002295737,0.00004269959,0.00002927876,0.001021561,0.994705,0.000005792836,0.0004606911,0.00000658741],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9986703,0.0003893943,0.0005266623,0.000008744068,0.0000110778,0.000005898696,0.00004312729,0.00001901669,0.0003257013],"genre_scores_gemma":[0.9976262,0.0003511356,0.001432062,0.00001298491,0.000004862243,0.00001118717,0.00007064977,0.00001730155,0.0004736182],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001398187,"threshold_uncertainty_score":0.002780139,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.003549774654165064,"score_gpt":0.1887479964841642,"score_spread":0.1851982218299991,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}