{"id":"W2005351648","doi":"10.1116/1.4754809","title":"Tilted nanostructure fabrication by electron beam lithography","year":2012,"lang":"en","type":"article","venue":"Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena","topic":"Advancements in Photolithography Techniques","field":"Engineering","cited_by":19,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Waterloo","funders":"","keywords":"Resist; Electron-beam lithography; Lithography; Scanning electron microscope; Materials science; Optics; Substrate (aquarium); Nanostructure; Nanolithography; Fabrication; X-ray lithography; Stencil lithography; Resolution (logic); Electron beam-induced deposition; Optoelectronics; Nanotechnology; Scanning transmission electron microscopy; Physics; Layer (electronics); Computer science","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":["metaepi_narrow"],"consensus_categories":[],"category_scores_codex":[0.001538773,0.0003234756,0.0004457613,0.001674536,0.0003831533,0.00008715451,0.0005310907,0.0003854251,0.000004590861],"category_scores_gemma":[0.00006680672,0.0002853674,0.00003430707,0.001730537,0.001012197,0.0007444591,0.00009855427,0.0005472754,3.992911e-7],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002312804,"about_ca_system_score_gemma":0.0001201272,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":7.006456e-7,"about_ca_topic_score_gemma":4.348429e-7,"domain_scores_codex":[0.9978181,0.00002422073,0.0005923733,0.0002884427,0.0003629571,0.0009139331],"domain_scores_gemma":[0.9988286,0.000008934145,0.0004119727,0.0002368246,0.0004067709,0.0001068877],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00002648855,0.00004953947,0.000588127,0.00006521679,0.00004333235,4.959484e-7,0.0000923414,7.540714e-7,0.9661071,0.001032128,0.00009865047,0.03189584],"study_design_scores_gemma":[0.0003519701,0.0003682903,0.0001524289,0.00008077788,0.00006915309,0.0002218182,0.00007503246,0.000008865772,0.9812958,0.009020678,0.008078242,0.0002769895],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9288595,0.06064099,0.009261115,0.000258161,0.0003061145,0.0002482729,0.000005875051,0.0003864648,0.00003345125],"genre_scores_gemma":[0.9902076,0.005263653,0.004365631,0.00004122976,0.00006074812,0.00002459853,0.000001830188,0.00003126825,0.000003432152],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.06134806,"threshold_uncertainty_score":0.9999598,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.00568440787935997,"score_gpt":0.2179870884313413,"score_spread":0.2123026805519813,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}