{"id":"W2007031005","doi":"10.4028/www.scientific.net/msf.495-497.1449","title":"New Interpretation of the Influence of Various Parameters on Texture Evolution in Damascene Cu Interconnect Lines","year":2005,"lang":"en","type":"article","venue":"Materials science forum","topic":"Copper Interconnects and Reliability","field":"Materials Science","cited_by":1,"is_retracted":false,"has_abstract":true,"ca_institutions":"McGill University","funders":"","keywords":"Copper interconnect; Materials science; Texture (cosmology); Dislocation; Interpretation (philosophy); Interconnection; Line (geometry); Shear (geology); Condensed matter physics; Crystallography; Composite material; Metallurgy; Copper; Geometry; Artificial intelligence; Computer science; Physics; Mathematics; Chemistry; Telecommunications","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.001355695,0.0001758922,0.0003287321,0.0001992946,0.00009763605,0.00008596091,0.0009829053,0.00008472867,0.0001728597],"category_scores_gemma":[0.0008546309,0.0001108316,0.00007044995,0.0005522214,0.0006397046,0.0005926607,0.0003002232,0.00009263115,0.00002936617],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002139063,"about_ca_system_score_gemma":0.0002661675,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.001820484,"about_ca_topic_score_gemma":0.0006815903,"domain_scores_codex":[0.9978624,0.000136063,0.000699018,0.0004418532,0.0004720943,0.0003885783],"domain_scores_gemma":[0.9986998,0.0001176715,0.0003582476,0.0005903666,0.0001673097,0.00006661691],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0001373017,0.00006750313,0.00150417,0.00003254018,0.000001480098,2.385246e-7,0.0008811813,0.01572899,0.977885,0.0009844756,0.00003438273,0.002742729],"study_design_scores_gemma":[0.0002659953,0.0002149097,0.05069749,0.0003700291,0.000006923713,0.000005574466,0.0001974106,0.001076346,0.9453203,0.001686111,0.00002928452,0.0001295947],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9965842,0.00002734195,0.0006200257,0.001147051,0.001065313,0.0003652236,0.0000292143,0.00002397807,0.0001376543],"genre_scores_gemma":[0.9984978,0.000004272841,0.001232247,0.0001763597,0.00003711398,0.00001032379,8.634768e-7,0.00000857786,0.00003240167],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.04919332,"threshold_uncertainty_score":0.4519583,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.006792590341629162,"score_gpt":0.2492869921997546,"score_spread":0.2424944018581254,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}