{"id":"W2008039559","doi":"10.1143/jjap.43.7287","title":"Kinetics of TiN Chemical Vapor Deposition Process using TiCl<sub>4</sub>and NH<sub>3</sub>for ULSI Diffusion Barrier Applications: Relationship between Step Coverage and NH<sub>3</sub>Partial Pressure","year":2004,"lang":"en","type":"article","venue":"Japanese Journal of Applied Physics","topic":"Metal and Thin Film Mechanics","field":"Engineering","cited_by":7,"is_retracted":false,"has_abstract":true,"ca_institutions":"","funders":"Natural Sciences and Engineering Research Council of Canada","keywords":"Tin; Sticking probability; Chemical vapor deposition; Diffusion; Kinetics; Chemistry; Diffusion barrier; Deposition (geology); Sticking coefficient; Analytical Chemistry (journal); Chemical kinetics; Reaction rate; Chemical engineering; Physical chemistry; Thermodynamics; Adsorption; Catalysis; Layer (electronics); Organic chemistry; Desorption","routes":{"ca_aff":false,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":true},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":["metaepi_narrow"],"consensus_categories":[],"category_scores_codex":[0.0002796388,0.0003484774,0.0005601569,0.000105503,0.0001644765,0.00006827842,0.0001810562,0.0002499055,7.419578e-7],"category_scores_gemma":[0.00004675217,0.0003380737,0.0001307483,0.0003565855,0.00008719671,0.0003057136,0.00006451699,0.0004611057,0.000003806028],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00007680761,"about_ca_system_score_gemma":0.00004227145,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":9.615826e-7,"about_ca_topic_score_gemma":7.833199e-7,"domain_scores_codex":[0.9979841,0.00002887501,0.0008522248,0.000292949,0.0005038623,0.000338007],"domain_scores_gemma":[0.998596,0.0001823609,0.0004819338,0.0002405689,0.000238838,0.0002602825],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0001597661,0.0001443879,0.0004014602,0.0006005607,0.0001083138,0.000001941994,0.0007081908,0.02034676,0.9717658,0.000920083,0.000004980925,0.004837757],"study_design_scores_gemma":[0.001753397,0.0001066915,0.0008436635,0.0001503269,0.0004650575,0.00004869638,0.0001136352,0.01536587,0.9673055,0.01349407,0.0000147932,0.0003382213],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9171534,0.0001256091,0.08177815,0.00001187852,0.0001013608,0.0006873854,0.00005502043,0.00004744283,0.00003973048],"genre_scores_gemma":[0.9974551,0.00005873648,0.00174102,0.00002159625,0.0005417511,0.00005814947,0.00004834415,0.00007479972,5.443839e-7],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.08030164,"threshold_uncertainty_score":0.9999071,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01335677087080443,"score_gpt":0.2242247783933402,"score_spread":0.2108680075225357,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}