{"id":"W2008141418","doi":"10.1117/12.567568","title":"Comparison of three finite element models for analysis of MEMS micromirrors","year":2004,"lang":"en","type":"article","venue":"Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":6,"is_retracted":false,"has_abstract":true,"ca_institutions":"McGill University","funders":"","keywords":"Microelectromechanical systems; Finite element method; Software; Materials science; Field (mathematics); Computer science; Square (algebra); Mechanical engineering; Structural engineering; Engineering; Optoelectronics; Geometry","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":["metaepi_narrow"],"consensus_categories":[],"category_scores_codex":[0.0003162163,0.000297824,0.0007883547,0.0002630709,0.00004100092,0.00002202487,0.0007726385,0.0002073004,0.000003804609],"category_scores_gemma":[0.0002203858,0.0002619971,0.0009103762,0.0006283689,0.0002059243,0.0003443819,0.0001127654,0.0002160146,1.591433e-7],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001539418,"about_ca_system_score_gemma":0.0000176877,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00001383442,"about_ca_topic_score_gemma":0.000001813841,"domain_scores_codex":[0.9979509,2.705857e-9,0.0009700073,0.0002750119,0.0004571244,0.0003469674],"domain_scores_gemma":[0.9982172,0.0001380654,0.0004215436,0.00008012626,0.001080281,0.00006279004],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00004685125,0.0001036957,0.0001523711,0.000577686,0.001673438,1.340354e-8,0.0002015637,0.1233872,0.6807196,0.1927474,0.0001505583,0.0002396454],"study_design_scores_gemma":[0.0009674404,0.0002923932,0.0004332689,0.0002197174,0.0006939115,7.192115e-7,0.001106113,0.2212664,0.7657792,0.008629932,0.0003378062,0.0002731654],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9932142,0.0002502724,0.004957302,0.0002893718,0.0001211121,0.0005578998,0.0001520782,0.0001300031,0.0003276829],"genre_scores_gemma":[0.7984074,0.0001347552,0.2011959,0.000008707057,0.00004761666,0.0001334355,0.00001277606,0.00004675843,0.00001261272],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.1962386,"threshold_uncertainty_score":0.9999833,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.02680071612802506,"score_gpt":0.2692189171280389,"score_spread":0.2424182010000138,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}