{"id":"W2008923294","doi":"10.1002/sia.1909","title":"Critical review of the current status of thickness measurements for ultrathin SiO <sub>2</sub> on Si Part V: Results of a CCQM pilot study","year":2004,"lang":"en","type":"article","venue":"Surface and Interface Analysis","topic":"Electron and X-Ray Spectroscopy Techniques","field":"Materials Science","cited_by":140,"is_retracted":false,"has_abstract":true,"ca_institutions":"National Research Council Canada","funders":"","keywords":"Reflectometry; X-ray photoelectron spectroscopy; Analytical Chemistry (journal); Materials science; Neutron reflectometry; Ellipsometry; Wafer; Scattering; Chemistry; Thin film; Optics; Nanotechnology; Neutron scattering; Nuclear magnetic resonance; Time domain","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.03316176,0.0008121367,0.001293102,0.00300518,0.0009225673,0.00298019,0.002623214,0.002529918,0.001794831],"category_scores_gemma":[0.03017704,0.0006173339,0.001019589,0.002317081,0.001618342,0.00250754,0.0009132709,0.002253408,0.001162952],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.002722782,"about_ca_system_score_gemma":0.004925775,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.004289743,"about_ca_topic_score_gemma":0.003936185,"domain_scores_codex":[0.9903819,0.003220176,0.00137732,0.0009144953,0.003742407,0.0003637833],"domain_scores_gemma":[0.8998436,0.02728737,0.005652733,0.002625896,0.06292677,0.001663664],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"design_other","study_design_gemma":"observational","study_design_scores_codex":[0.001573002,0.0003916977,0.004154385,0.02224461,0.0003626675,0.0007103875,0.001453816,0.001145011,0.1038847,0.005771153,0.1352606,0.723048],"study_design_scores_gemma":[0.0001122874,0.003218505,0.01682373,0.006046267,0.000483685,0.0007346513,0.001199793,0.0006739823,0.08271876,0.001385907,0.8864643,0.0001380535],"study_design_candidate":"observational","study_design_consensus":null,"genre_codex":"review","genre_gemma":"review","genre_scores_codex":[0.02391209,0.9103548,0.01203446,0.03104214,0.01391405,0.0006519999,0.0006687069,0.0002586295,0.007163181],"genre_scores_gemma":[0.1349945,0.7634456,0.03271543,0.03159242,0.01916049,0.001180271,0.001992625,0.0005170415,0.01440156],"genre_candidate":"review","genre_consensus":"review","teacher_disagreement_score":0.03316176,"threshold_uncertainty_score":0.1753783,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.05555062187270993,"score_gpt":0.3556288830944233,"score_spread":0.3000782612217134,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}