{"id":"W2008937700","doi":"10.1115/detc2013-13376","title":"Low Voltage Electrostatic Actuation for MEMS Actuator Using Frequency Modulation","year":2013,"lang":"en","type":"article","venue":"","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":2,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Waterloo","funders":"","keywords":"Actuator; Capacitance; Microelectromechanical systems; Voltage; Control theory (sociology); Linearization; Modulation (music); SIGNAL (programming language); Stability (learning theory); Materials science; Parasitic capacitance; Engineering; Physics; Acoustics; Computer science; Electrical engineering; Nonlinear system; Optoelectronics; Electrode","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00008180316,0.0002022862,0.0001553444,0.00009795656,0.000197642,0.000205741,0.0003020695,0.0003206423,0.0007278628],"category_scores_gemma":[0.0001945807,0.00008914534,0.0002079122,0.00007871664,0.0002769933,0.0002728912,0.0001675131,0.0001807759,0.0002451539],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002715072,"about_ca_system_score_gemma":0.0001545562,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0004889428,"about_ca_topic_score_gemma":0.000581067,"domain_scores_codex":[0.9999068,0.0000116878,0.000002575169,0.00001569061,0.00005619944,0.000007062746],"domain_scores_gemma":[0.9999616,0.00001694692,0.000007747375,0.000004296023,0.000007836098,0.000001533301],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00006778721,0.0000213376,0.0004212499,0.0001455723,0.0000193512,0.0003323537,0.000105982,0.06237407,0.9012866,0.01375761,0.0003678318,0.02110026],"study_design_scores_gemma":[0.00001617097,0.0001426332,0.0007621803,0.00001477366,0.00001710925,0.0003409956,0.00002727032,0.872484,0.1197393,0.002864856,0.003574044,0.00001678154],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"methods","genre_gemma":"empirical","genre_scores_codex":[0.3239978,0.001679425,0.6566167,0.0005088087,0.00008909501,0.00005529214,0.00006216288,0.0005894873,0.0164012],"genre_scores_gemma":[0.9787173,0.0003142015,0.01834456,0.00003629119,0.00002121527,0.00001931606,0.00001476459,0.00001580469,0.002516608],"genre_candidate":"empirical","genre_consensus":null,"teacher_disagreement_score":0.0007278628,"threshold_uncertainty_score":0.002434969,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01281046888101263,"score_gpt":0.2356334929075634,"score_spread":0.2228230240265507,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}