{"id":"W2009029168","doi":"10.1557/proc-686-a2.5","title":"Integration Challenges for Double-Gate MOSFET Technologies","year":2001,"lang":"en","type":"article","venue":"MRS Proceedings","topic":"Advancements in Semiconductor Devices and Circuit Design","field":"Engineering","cited_by":6,"is_retracted":false,"has_abstract":false,"ca_institutions":"Advanced Micro Devices (Canada)","funders":"","keywords":"Materials science; MOSFET; Transistor; Scaling; Optoelectronics; Channel (broadcasting); Realization (probability); Wafer; Metal gate; Nanotechnology; Process (computing); NAND gate; Logic gate; Electronic engineering; Computer science; Electrical engineering; Gate oxide; Engineering; Voltage","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.001181967,0.0003616243,0.0007997436,0.0002838793,0.0006383163,0.002645416,0.001375447,0.001697281,0.005312649],"category_scores_gemma":[0.001277771,0.0003845701,0.000398069,0.0003920386,0.0003284073,0.00305169,0.001135597,0.001134403,0.001909841],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0007817306,"about_ca_system_score_gemma":0.0008150126,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0006536797,"about_ca_topic_score_gemma":0.001924375,"domain_scores_codex":[0.9995567,0.0000334634,0.00001710829,0.0000557025,0.0002491843,0.00008779478],"domain_scores_gemma":[0.999414,0.0001394718,0.00003596424,0.00004998096,0.0002906603,0.00006992387],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0003710357,0.0002564297,0.002805178,0.001375984,0.0001295512,0.001125984,0.0009483282,0.009832762,0.4198498,0.1482012,0.03557459,0.3795292],"study_design_scores_gemma":[0.0001226045,0.00141201,0.004682971,0.0005667293,0.000240952,0.004567305,0.001858458,0.07684842,0.1428921,0.1453417,0.6213377,0.0001290442],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.4229612,0.09915103,0.3095337,0.03314601,0.005751981,0.0002732963,0.0008458263,0.002421043,0.1259159],"genre_scores_gemma":[0.7898082,0.02973132,0.1380497,0.003808227,0.00164447,0.0001996465,0.0007415977,0.0004121858,0.03560457],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.005312649,"threshold_uncertainty_score":0.01777261,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.04888812130441485,"score_gpt":0.25889978544806,"score_spread":0.2100116641436452,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}