{"id":"W2009073215","doi":"10.1116/1.3054134","title":"Profile evolution simulator for sputtering and ion-enhanced chemical etching","year":2008,"lang":"en","type":"article","venue":"Journal of Vacuum Science & Technology A Vacuum Surfaces and Films","topic":"Semiconductor materials and devices","field":"Engineering","cited_by":26,"is_retracted":false,"has_abstract":true,"ca_institutions":"Université de Montréal","funders":"Natural Sciences and Engineering Research Council of Canada","keywords":"Sputtering; Wafer; Plasma; Etching (microfabrication); Plasma etching; Materials science; Argon; Ion; Isotropic etching; Isotropy; Analytical Chemistry (journal); Atomic physics; Chemistry; Optoelectronics; Nanotechnology; Thin film; Optics","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.000408711,0.0005346424,0.000542969,0.0003034938,0.0002504319,0.0004448745,0.001411726,0.0007469103,0.004126923],"category_scores_gemma":[0.001064701,0.0004418521,0.0005306175,0.0003467483,0.0001566982,0.0003860794,0.0004163542,0.0007536652,0.0007458836],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.000718611,"about_ca_system_score_gemma":0.0007657705,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.003669619,"about_ca_topic_score_gemma":0.002534455,"domain_scores_codex":[0.9998171,0.00002571692,0.00001172293,0.00002143469,0.0001055251,0.00001864219],"domain_scores_gemma":[0.9995821,0.0002044907,0.00002879081,0.0000505374,0.0001078597,0.00002624756],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"simulation_or_modeling","study_design_gemma":"simulation_or_modeling","study_design_scores_codex":[0.0002152937,0.0001199059,0.002414098,0.0003371309,0.00009056085,0.0002942997,0.0002406048,0.8542007,0.08528941,0.008980826,0.003971331,0.04384579],"study_design_scores_gemma":[0.00002202824,0.00002984509,0.0002113956,0.000005039,0.000008251648,0.00004733678,0.000006874091,0.9807252,0.0123967,0.0004576456,0.006078534,0.00001116301],"study_design_candidate":"simulation_or_modeling","study_design_consensus":"simulation_or_modeling","genre_codex":"methods","genre_gemma":"methods","genre_scores_codex":[0.04797405,0.0002027328,0.9323341,0.00006745427,0.00007465695,0.0003022275,0.001290374,0.01115402,0.006600412],"genre_scores_gemma":[0.5446004,0.0005630719,0.4366807,0.00009118164,0.00002670659,0.001403027,0.002718225,0.001746564,0.01217012],"genre_candidate":"methods","genre_consensus":"methods","teacher_disagreement_score":0.004126923,"threshold_uncertainty_score":0.01380599,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.009643906650276268,"score_gpt":0.2267821865009471,"score_spread":0.2171382798506708,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}