{"id":"W2009073215","doi":"10.1116/1.3054134","title":"Profile evolution simulator for sputtering and ion-enhanced chemical etching","year":2008,"lang":"en","type":"article","venue":"Journal of Vacuum Science & Technology A Vacuum Surfaces and Films","topic":"Semiconductor materials and devices","field":"Engineering","cited_by":26,"is_retracted":false,"has_abstract":true,"ca_institutions":"Université de Montréal","funders":"Natural Sciences and Engineering Research Council of Canada","keywords":"Sputtering; Wafer; Plasma; Etching (microfabrication); Plasma etching; Materials science; Argon; Ion; Isotropic etching; Isotropy; Analytical Chemistry (journal); Atomic physics; Chemistry; Optoelectronics; Nanotechnology; Thin film; Optics","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0003951196,0.0001601883,0.0003193603,0.0003735617,0.0002461248,0.00005765158,0.0002523258,0.0001594271,0.00001171108],"category_scores_gemma":[0.00006155859,0.0001305595,0.00004138269,0.0004131383,0.0003948279,0.0005768851,0.00008417893,0.0002058327,0.000001176307],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00004352563,"about_ca_system_score_gemma":0.00005537795,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.000002711414,"about_ca_topic_score_gemma":4.599364e-7,"domain_scores_codex":[0.9989019,0.000005869382,0.0003732523,0.000209062,0.0001773903,0.0003325318],"domain_scores_gemma":[0.9994428,0.0000508982,0.0001517596,0.0001231412,0.0001325877,0.00009879615],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00001662355,0.00001088463,0.001357116,0.00004394992,0.0000131514,0.000004134627,0.000215748,0.0004702173,0.997395,0.0001376864,0.00004834181,0.0002871246],"study_design_scores_gemma":[0.0006810914,0.0002121715,0.003231785,0.0001120739,0.00002335709,0.000516011,0.0005702911,0.03306713,0.9597429,0.001340002,0.0002433441,0.000259854],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9949174,0.001989217,0.002142941,0.000144113,0.0005370264,0.0001338539,0.000007492481,0.0001039451,0.00002399396],"genre_scores_gemma":[0.991793,0.0002875731,0.007810513,0.00001538263,0.00006483067,0.000005343214,4.016476e-7,0.00001478534,0.000008145135],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.03765213,"threshold_uncertainty_score":0.5324062,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.009643906650276268,"score_gpt":0.2267821865009471,"score_spread":0.2171382798506708,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}