{"id":"W2010117839","doi":"10.1021/ie0402923","title":"Abatement of Perfluorocompounds by Tandem Packed-Bed Plasmas for Semiconductor Manufacturing Processes","year":2005,"lang":"en","type":"article","venue":"Industrial & Engineering Chemistry Research","topic":"Plasma Applications and Diagnostics","field":"Medicine","cited_by":9,"is_retracted":false,"has_abstract":true,"ca_institutions":"","funders":"McMaster University","keywords":"Semiconductor; Dielectric; Arrhenius equation; Packed bed; Dielectric barrier discharge; Pellets; Tandem; Plasma; Materials science; Analytical Chemistry (journal); Decomposition; Semiconductor device fabrication; Residence time (fluid dynamics); Chemical engineering; Chemistry; Activation energy; Physical chemistry; Composite material; Optoelectronics; Chromatography; Organic chemistry","routes":{"ca_aff":false,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":true},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0002866974,0.0004116138,0.0005053804,0.0002733055,0.0002187281,0.0003177102,0.0004076685,0.0006005587,0.0005158274],"category_scores_gemma":[0.0004239084,0.0002701325,0.0004562022,0.0002154503,0.0002355469,0.0003817804,0.0002543925,0.0004207134,0.0003259967],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002805275,"about_ca_system_score_gemma":0.0002570373,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0005442174,"about_ca_topic_score_gemma":0.001102451,"domain_scores_codex":[0.9997601,0.00003502412,0.000009546979,0.0000367182,0.0001223038,0.00003640502],"domain_scores_gemma":[0.999826,0.00006291646,0.00004292756,0.00001313712,0.00003859288,0.00001639065],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0000655734,0.00002142184,0.0001792763,0.00005500039,0.000007499062,0.00006746884,0.00002226378,0.0007172333,0.9907987,0.00004885272,0.00003351945,0.007983339],"study_design_scores_gemma":[0.000007960864,0.0003174898,0.0005435621,0.000002907979,0.00001890212,0.0003366469,0.00001554942,0.005468996,0.9925705,0.00005150914,0.0006604252,0.000005571864],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9369569,0.004216671,0.05768365,0.0001119324,0.00003923804,0.00004037236,0.00004215396,0.0002482136,0.0006608721],"genre_scores_gemma":[0.959883,0.001678932,0.03690375,0.00004088596,0.00002390764,0.00001994309,0.0000795302,0.00002174156,0.001348334],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.0006005587,"threshold_uncertainty_score":0.002035379,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.0943154314144796,"score_gpt":0.3547793700683893,"score_spread":0.2604639386539097,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}