{"id":"W2010800669","doi":"10.1088/1464-4258/8/7/s07","title":"Deformable MEMS grating for wide tunability and high operating speed","year":2006,"lang":"en","type":"article","venue":"Journal of Optics A Pure and Applied Optics","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":34,"is_retracted":false,"has_abstract":true,"ca_institutions":"Polytechnique Montréal","funders":"","keywords":"Microelectromechanical systems; Grating; Optics; Materials science; Optoelectronics; Physics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00009028512,0.0001746532,0.0001298856,0.0001401673,0.000119859,0.0001381747,0.0002760468,0.0003063476,0.002576369],"category_scores_gemma":[0.0001407498,0.000105186,0.00007646205,0.0001095325,0.0001623722,0.0002089839,0.0001851429,0.0003189341,0.0008743586],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002241644,"about_ca_system_score_gemma":0.00007063496,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0002394488,"about_ca_topic_score_gemma":0.0003429067,"domain_scores_codex":[0.9999053,0.000005392897,0.000004740173,0.00002083026,0.00005258693,0.00001108397],"domain_scores_gemma":[0.9999306,0.00001669659,0.00001533207,0.00001834199,0.000009764573,0.000009129845],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00001822434,0.000009517628,0.00006312966,0.00002560064,0.000001519712,0.00004221596,0.00001237458,0.0002065424,0.9811109,0.001616648,0.0004420922,0.01645119],"study_design_scores_gemma":[0.00002335502,0.000115026,0.001995687,0.000007365395,0.000006414215,0.0004720317,0.00001027978,0.01249692,0.9441465,0.0007696897,0.03994084,0.00001598537],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.7556003,0.012715,0.1705928,0.001617645,0.001052154,0.0001350315,0.0006025247,0.003935104,0.05374946],"genre_scores_gemma":[0.9347982,0.0009954048,0.05180823,0.0002697007,0.000102506,0.000029452,0.000177918,0.0001130689,0.01170539],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.002576369,"threshold_uncertainty_score":0.008618832,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.007327915194003113,"score_gpt":0.2102503945039088,"score_spread":0.2029224793099057,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}