{"id":"W2011366011","doi":"10.1117/12.644429","title":"Development of a mechanical model for a micromachined resonant force sensor used in passive microgripping applications","year":2006,"lang":"en","type":"article","venue":"Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Toronto","funders":"","keywords":"Tuning fork; Gauge factor; Resonator; Microelectromechanical systems; Q factor; Materials science; Acoustics; Computer science; Optoelectronics; Physics; Vibration; Fabrication","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0002342857,0.0006022832,0.0004447185,0.0003543548,0.0003779629,0.0005315763,0.001348811,0.001242025,0.002548249],"category_scores_gemma":[0.000389677,0.0004798684,0.0006020927,0.0001630599,0.0004313679,0.0008827368,0.0004235178,0.0007748972,0.001091704],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0005178291,"about_ca_system_score_gemma":0.0006516808,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.002546529,"about_ca_topic_score_gemma":0.002611018,"domain_scores_codex":[0.999801,0.0000196794,0.000009583275,0.00005293651,0.000105112,0.00001177583],"domain_scores_gemma":[0.9998831,0.00003792891,0.00002277075,0.00001488795,0.00003532771,0.000006071063],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"simulation_or_modeling","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00003731214,0.00007713676,0.0006579807,0.0003919566,0.00003235755,0.0004974632,0.0001722263,0.7152514,0.2045715,0.04809256,0.0009538166,0.02926416],"study_design_scores_gemma":[0.000007021567,0.00005047743,0.0002435246,0.00001058371,0.000007108416,0.00008221827,0.00001307484,0.9864002,0.005786554,0.002044703,0.005344818,0.000009747375],"study_design_candidate":"bench_or_experimental","study_design_consensus":null,"genre_codex":"methods","genre_gemma":"methods","genre_scores_codex":[0.01724434,0.0004885053,0.9691631,0.0003347771,0.0001062847,0.0001363249,0.0001838583,0.0003536835,0.01198913],"genre_scores_gemma":[0.507805,0.002161752,0.4544553,0.0002466694,0.0001117188,0.001094669,0.000454599,0.0002464232,0.03342387],"genre_candidate":"methods","genre_consensus":"methods","teacher_disagreement_score":0.002548249,"threshold_uncertainty_score":0.008524716,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01141356131526494,"score_gpt":0.2276001683479126,"score_spread":0.2161866070326477,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}