{"id":"W2011451128","doi":"10.1088/0960-1317/18/4/045012","title":"The effects of non-uniform nanoscale deflections on capacitance in RF MEMS parallel-plate variable capacitors","year":2008,"lang":"en","type":"article","venue":"Journal of Micromechanics and Microengineering","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":11,"is_retracted":false,"has_abstract":true,"ca_institutions":"Dalhousie University","funders":"Dalhousie University","keywords":"Capacitance; Capacitor; Microelectromechanical systems; Materials science; Capacitive sensing; Variable capacitor; Residual stress; Finite element method; Stress (linguistics); Voltage; Structural engineering; Electrical engineering; Physics; Optoelectronics; Composite material; Engineering; Electrode","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001309065,0.000166588,0.0002844482,0.0002083048,0.00009884508,0.00001154125,0.0001594271,0.000102662,6.46061e-7],"category_scores_gemma":[0.00005370921,0.000130497,0.00006359116,0.0002572102,0.00003557061,0.0001179029,0.00001721707,0.0004154954,5.324595e-7],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00008446665,"about_ca_system_score_gemma":0.00001571522,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00000626828,"about_ca_topic_score_gemma":0.00000941837,"domain_scores_codex":[0.99917,0.00000214072,0.0003750558,0.00008707013,0.00009261307,0.0002731158],"domain_scores_gemma":[0.9995291,0.0001305882,0.0001047272,0.0001388145,0.00004750747,0.00004928949],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00001157949,0.00001672298,0.000005743167,0.00009738628,0.00003745386,0.00002676083,0.0001690204,0.01548663,0.9829565,0.0002429201,0.0001384448,0.0008108966],"study_design_scores_gemma":[0.0006400079,0.0002478479,0.0001048177,0.0004242959,0.00001388859,0.0003848665,0.0001354237,0.002497413,0.9924433,0.0007203043,0.00221431,0.0001734902],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9598451,0.002958237,0.03606227,0.00001479523,0.0009131415,0.0001113863,0.000003143203,0.00003824486,0.00005364253],"genre_scores_gemma":[0.9728124,0.01442439,0.01261805,0.000006989523,0.00004749933,0.000006686916,2.827997e-7,0.00003370094,0.00005006836],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.02344422,"threshold_uncertainty_score":0.5321512,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.004525380645221104,"score_gpt":0.1822796229134716,"score_spread":0.1777542422682505,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}