{"id":"W2011902862","doi":"10.1143/jjap.39.2203","title":"Study of Optimization Guidelines on Nitrogen Concentration in Nitrided Oxide for Logic and Dynamic Random Access Memory Application","year":2000,"lang":"en","type":"article","venue":"Japanese Journal of Applied Physics","topic":"Semiconductor materials and devices","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"","funders":"Glaucoma Research Society of Canada","keywords":"Dram; Dynamic random-access memory; Gate oxide; Materials science; Optoelectronics; Degradation (telecommunications); Transistor; Nitriding; Oxide; Logic gate; AND gate; Electronic engineering; Nitrogen; MOSFET; Channel (broadcasting); Computer science; Electrical engineering; Semiconductor memory; Nanotechnology; Computer hardware; Voltage; Chemistry; Engineering; Layer (electronics)","routes":{"ca_aff":false,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":true},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0004166219,0.0004504165,0.0003296071,0.0002573414,0.0002705019,0.000472276,0.0006595543,0.000425695,0.0004360666],"category_scores_gemma":[0.001471396,0.0002013898,0.0001543883,0.0002186313,0.0001565283,0.0006024162,0.0002439714,0.000224585,0.0001240945],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0005602946,"about_ca_system_score_gemma":0.0004722258,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.001380447,"about_ca_topic_score_gemma":0.003639848,"domain_scores_codex":[0.9997149,0.00004213066,0.00001789456,0.00006836265,0.0001209454,0.00003571684],"domain_scores_gemma":[0.9993458,0.0001968974,0.0002065649,0.00003010147,0.0002014977,0.00001915191],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0003337828,0.000168438,0.00550957,0.001025289,0.0001069127,0.0003146071,0.000175431,0.1479071,0.7883908,0.005042828,0.001384605,0.04964055],"study_design_scores_gemma":[0.00007152745,0.001062287,0.006308625,0.000134349,0.0001957621,0.0003084335,0.0002291884,0.2814342,0.6962548,0.0021557,0.01178025,0.00006461843],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.8574265,0.01284199,0.1136737,0.0007898536,0.0001249813,0.0001632076,0.0002255005,0.0003399408,0.01441428],"genre_scores_gemma":[0.9691096,0.002030722,0.02746644,0.0001017089,0.0000269075,0.00005146518,0.0000910942,0.00007881795,0.001043156],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001380447,"threshold_uncertainty_score":0.004065275,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.02614966524914451,"score_gpt":0.2907049401060617,"score_spread":0.2645552748569172,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}