{"id":"W2011960248","doi":"10.2494/photopolymer.16.13","title":"Chemically Amplified Main Chain Scission: Chopping the Influence of Polymer Dimensions on Line Edge Roughness","year":2003,"lang":"en","type":"article","venue":"Journal of Photopolymer Science and Technology","topic":"Advancements in Photolithography Techniques","field":"Engineering","cited_by":7,"is_retracted":false,"has_abstract":true,"ca_institutions":"Infineon Technologies (Canada)","funders":"","keywords":"Resist; Photoresist; Materials science; Polymer; Lithography; Surface finish; Enhanced Data Rates for GSM Evolution; Surface roughness; Composite material; Nanotechnology; Optoelectronics; Computer science; Layer (electronics)","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0007474442,0.0001589926,0.000265328,0.0007276581,0.000183584,0.0000203725,0.0006154549,0.0001151467,0.00001047085],"category_scores_gemma":[0.0002844988,0.0001069128,0.00004657372,0.001937561,0.001346894,0.0002386592,0.00008371376,0.0004228464,4.48823e-7],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00005013018,"about_ca_system_score_gemma":0.0001076832,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.000002516947,"about_ca_topic_score_gemma":5.818427e-7,"domain_scores_codex":[0.9985964,0.00001922101,0.0004598154,0.0001792957,0.0004197606,0.00032552],"domain_scores_gemma":[0.9990275,0.00007531876,0.0002112027,0.0003727988,0.0002269848,0.00008618982],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.000008931083,0.00003706923,0.0004214292,0.00001018946,0.00001579888,0.000008415544,0.00008524026,0.00009208806,0.9833362,0.01295527,0.00003689174,0.00299251],"study_design_scores_gemma":[0.0002142474,0.0001671883,0.00009616277,0.000131372,0.00001235984,0.000234853,0.0001856181,0.0001917707,0.9935574,0.004464402,0.0006279772,0.0001166526],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9950041,0.001702135,0.002018546,0.0003201574,0.0001967931,0.0001403289,0.000002094089,0.00007431316,0.0005415175],"genre_scores_gemma":[0.9978604,0.000309287,0.00163134,0.0001486974,0.00001632889,0.000007506777,6.771252e-8,0.00001248052,0.0000139075],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.01022123,"threshold_uncertainty_score":0.4962685,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.00902419919118978,"score_gpt":0.257636971277807,"score_spread":0.2486127720866173,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}