{"id":"W2012451070","doi":"10.1049/mnl.2011.0548","title":"Very high sensitivity ZEP resist using MEK:MIBK developer","year":2011,"lang":"en","type":"article","venue":"Micro & Nano Letters","topic":"Advancements in Photolithography Techniques","field":"Engineering","cited_by":21,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Waterloo","funders":"","keywords":"Resist; Methyl isobutyl ketone; Electron-beam lithography; Lithography; Materials science; Xylene; Coating; Layer (electronics); Ketone; Optoelectronics; Analytical Chemistry (journal); Nanotechnology; Chemistry; Organic chemistry; Toluene","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":["metaepi_narrow"],"consensus_categories":[],"category_scores_codex":[0.0001778071,0.0002626096,0.0002278215,0.0001904549,0.00009973669,0.00002490798,0.0001626025,0.00009044429,0.00007019527],"category_scores_gemma":[0.000008129666,0.0002863583,0.00008510212,0.0002318393,0.0001079108,0.0002392268,0.00007374339,0.0001691775,0.00002935267],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001610103,"about_ca_system_score_gemma":0.00001081188,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0001984152,"about_ca_topic_score_gemma":0.00001704682,"domain_scores_codex":[0.9988465,0.00004856278,0.0002477574,0.000277607,0.0001385235,0.0004409994],"domain_scores_gemma":[0.99945,0.00002702784,0.00004316701,0.0003884253,0.00003095284,0.00006041552],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00001240156,0.00001580368,0.001538201,0.00003287326,0.0000642448,0.00008929814,0.0002055816,0.00008458008,0.9927094,0.0000372488,0.004441687,0.0007686571],"study_design_scores_gemma":[0.0001761123,0.000008674056,0.004694515,0.00006147215,0.00002968796,0.00003594106,0.00001733674,0.00006141048,0.9826285,0.00007125288,0.01178482,0.0004303],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9338181,0.0001085168,0.06378134,0.0000572192,0.0004532522,0.0001975968,0.00002228265,0.0007251849,0.0008365278],"genre_scores_gemma":[0.804873,0.00001972297,0.1939022,0.001019396,0.00006257719,0.00001355856,0.000008031298,0.00007397169,0.00002753526],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.1301209,"threshold_uncertainty_score":0.9999589,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01825656516973821,"score_gpt":0.2076555983885225,"score_spread":0.1893990332187843,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}