{"id":"W2012451070","doi":"10.1049/mnl.2011.0548","title":"Very high sensitivity ZEP resist using MEK:MIBK developer","year":2011,"lang":"en","type":"article","venue":"Micro & Nano Letters","topic":"Advancements in Photolithography Techniques","field":"Engineering","cited_by":21,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Waterloo","funders":"","keywords":"Resist; Methyl isobutyl ketone; Electron-beam lithography; Lithography; Materials science; Xylene; Coating; Layer (electronics); Ketone; Optoelectronics; Analytical Chemistry (journal); Nanotechnology; Chemistry; Organic chemistry; Toluene","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0002962928,0.000566143,0.0003660509,0.0002936356,0.0002395068,0.0004693985,0.0004888962,0.0004514154,0.002662523],"category_scores_gemma":[0.000407781,0.0004342752,0.0001618992,0.0002055867,0.0002312721,0.0005132058,0.0004649282,0.0005936688,0.002467575],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002959546,"about_ca_system_score_gemma":0.0001924208,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0003878043,"about_ca_topic_score_gemma":0.001210195,"domain_scores_codex":[0.9994088,0.00006071139,0.00004507515,0.0001793521,0.0002387472,0.00006728282],"domain_scores_gemma":[0.999662,0.0001383015,0.0000693126,0.00005323542,0.00006042889,0.00001662598],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0000107377,0.000002728506,0.00006994144,0.00004944049,0.00000191342,0.00004590136,0.00001483924,0.00001134686,0.9982999,0.00006507742,0.0000624711,0.001365749],"study_design_scores_gemma":[0.000002077213,0.00001783186,0.0003578211,0.000003384407,0.000003196058,0.0002015127,0.000007772701,0.0001582959,0.9966742,0.00001903694,0.002550749,0.000004176838],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.834416,0.009510381,0.1325506,0.0009093534,0.0003577884,0.0003155188,0.0007086386,0.002540259,0.01869143],"genre_scores_gemma":[0.8933226,0.00348008,0.08689967,0.0001871375,0.00005039812,0.0001439559,0.0004689958,0.0002945695,0.01515261],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.002662523,"threshold_uncertainty_score":0.00890696,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01825656516973821,"score_gpt":0.2076555983885225,"score_spread":0.1893990332187843,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}