{"id":"W2012870271","doi":"10.1016/j.ceramint.2015.03.267","title":"Design and micro-machining fabrication of piezoelectric diaphragm chambers for biomaterial detection","year":2015,"lang":"en","type":"article","venue":"Ceramics International","topic":"Acoustic Wave Resonator Technologies","field":"Engineering","cited_by":6,"is_retracted":false,"has_abstract":false,"ca_institutions":"Simon Fraser University","funders":"National Natural Science Foundation of China","keywords":"Materials science; Wafer; Biomaterial; Fabrication; Layer (electronics); Piezoelectricity; Microelectromechanical systems; Etching (microfabrication); Silicon; Diaphragm (acoustics); Residual stress; Optoelectronics; Surface micromachining; Composite material; Nanotechnology; Electrical engineering","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001345851,0.00007755408,0.00008150416,0.0001759023,0.00002207842,0.00002890797,0.0001053234,0.00008005206,0.000001407273],"category_scores_gemma":[0.000212543,0.00008396865,0.00001786007,0.0001047354,0.00004399073,0.00007419728,0.00002235913,0.00004765744,0.000001131202],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001925264,"about_ca_system_score_gemma":0.0000260755,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00000672104,"about_ca_topic_score_gemma":5.909482e-7,"domain_scores_codex":[0.9995504,0.000007412811,0.0001475298,0.00009782622,0.0001008595,0.00009599045],"domain_scores_gemma":[0.9996759,0.00006838091,0.00004792995,0.00006731322,0.0001170484,0.00002342306],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"simulation_or_modeling","study_design_scores_codex":[0.0001583526,0.00004107306,0.0008569603,0.00008944819,0.0002175136,0.000001693461,0.0007700686,0.07756559,0.611159,0.003464029,0.0004645024,0.3052118],"study_design_scores_gemma":[0.0003747994,0.00004630904,0.0003298425,0.000008570168,0.00000859509,0.00001285847,0.00005588696,0.8852091,0.110366,0.003019365,0.0004759657,0.0000927169],"study_design_candidate":"simulation_or_modeling","study_design_consensus":null,"genre_codex":"methods","genre_gemma":"empirical","genre_scores_codex":[0.3292248,0.00009001348,0.6697762,0.00002883594,0.0005074091,0.0001199757,0.00001162578,0.0001414752,0.00009966725],"genre_scores_gemma":[0.9678021,0.00003886386,0.0319973,0.000004998055,0.00008509841,0.00002717662,0.00001654722,0.00001775232,0.00001017106],"genre_candidate":"empirical","genre_consensus":null,"teacher_disagreement_score":0.8076435,"threshold_uncertainty_score":0.3424142,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.02131469769823055,"score_gpt":0.2385401458421433,"score_spread":0.2172254481439128,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}