{"id":"W2013617114","doi":"10.1063/1.1755847","title":"Accuracy of photocarrier radiometric measurement of electronic transport properties of ion-implanted silicon wafers","year":2004,"lang":"en","type":"article","venue":"Journal of Applied Physics","topic":"Thermography and Photoacoustic Techniques","field":"Engineering","cited_by":41,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Toronto","funders":"","keywords":"Wafer; Ion implantation; Materials science; Silicon; Ion; Layer (electronics); Diffusion; Analytical Chemistry (journal); Optoelectronics; Chemistry; Nanotechnology","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.001766536,0.0006407443,0.0003672668,0.0006298444,0.0002015021,0.0007541174,0.000933581,0.0008075002,0.0007506619],"category_scores_gemma":[0.008692636,0.0002761848,0.000258911,0.0003148771,0.0003777553,0.0007796364,0.0004458302,0.0003661149,0.0006109352],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0004708136,"about_ca_system_score_gemma":0.0002350823,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0009759124,"about_ca_topic_score_gemma":0.000716947,"domain_scores_codex":[0.9985598,0.000246351,0.00007780863,0.0004648993,0.0005743579,0.00007675083],"domain_scores_gemma":[0.9965868,0.001592517,0.0003904052,0.0008480977,0.0005392099,0.00004291386],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0003605193,0.00004837524,0.008116022,0.0001270993,0.00004911325,0.00006742936,0.0001810897,0.007374191,0.9383987,0.0004181664,0.00014225,0.04471698],"study_design_scores_gemma":[0.00001634837,0.0002980086,0.01751245,0.00002778388,0.00005796426,0.0003901631,0.00009327106,0.08131551,0.8985837,0.0002971825,0.00136673,0.0000408147],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.7473546,0.001547514,0.2447088,0.0001394884,0.0001003788,0.00005374354,0.000330294,0.003376325,0.002388791],"genre_scores_gemma":[0.9658657,0.0002969021,0.03239407,0.00004427447,0.00001223429,0.00002989276,0.0002552665,0.0001251321,0.0009765329],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001766536,"threshold_uncertainty_score":0.009342432,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01396520013817194,"score_gpt":0.1986969162621312,"score_spread":0.1847317161239593,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}