{"id":"W2014380785","doi":"10.1088/0957-4484/19/12/125705","title":"Tailoring the microstructure and surface morphology of metal thin films for nano-electro-mechanical systems applications","year":2008,"lang":"en","type":"article","venue":"Nanotechnology","topic":"Force Microscopy Techniques and Applications","field":"Physics and Astronomy","cited_by":18,"is_retracted":false,"has_abstract":true,"ca_institutions":"National Institute for Nanotechnology; University of Alberta","funders":"","keywords":"Materials science; Nanoindentation; High-resolution transmission electron microscopy; Nanoelectromechanical systems; Amorphous solid; Microstructure; Surface roughness; Nanocrystalline material; Composite material; Crystallite; Transmission electron microscopy; Sputtering; Amorphous metal; Thin film; Nanotechnology; Metallurgy; Crystallography; Nanoparticle","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00009771348,0.0001389633,0.0002553995,0.00004303248,0.0002972482,0.000008864526,0.0003166685,0.0001950925,0.00002061747],"category_scores_gemma":[0.000004944498,0.000106187,0.0000755464,0.0002026581,0.0003306547,0.00002922553,0.0001011521,0.0002301568,0.000003167491],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00001079153,"about_ca_system_score_gemma":0.0000357346,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0001347206,"about_ca_topic_score_gemma":0.000001163418,"domain_scores_codex":[0.9991508,0.00001713023,0.0002562893,0.0002735095,0.00005198327,0.0002502601],"domain_scores_gemma":[0.9992658,0.00008454572,0.0001554884,0.0003990756,0.00007084457,0.00002422473],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.000005640654,0.0000243274,0.0001856078,0.000008503449,0.0000260935,1.015922e-7,0.00002447671,0.00003215492,0.720659,0.2781033,0.0005563465,0.0003745284],"study_design_scores_gemma":[0.0003372089,0.0001345718,0.00001912917,0.000007211139,0.00004475223,0.00006732316,0.0002249686,0.001084116,0.9364593,0.01547481,0.04598039,0.0001662295],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.8149347,0.0004786741,0.1824248,0.0005525028,0.00005355869,0.001159563,0.000177109,0.0001178701,0.000101222],"genre_scores_gemma":[0.9846629,0.00002996445,0.01439582,0.00002659519,0.00004029793,0.0005439919,0.00003584822,0.00001983058,0.0002447477],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.2626285,"threshold_uncertainty_score":0.4330181,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01001553634546349,"score_gpt":0.2494888378973582,"score_spread":0.2394733015518947,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}